Plasma as a medium for processing

D.C. Schram

Plasma as a medium for processing

D.C. Schram

Plasma & Materials Processing

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic

66 Downloads (Pure)

Original language	English
Title of host publication	Advanced course on low-pressure plasmas : technology and applications, Eindhoven University of Technology, Eindhoven, June 26-28, 1985 : lecture notes
Editors	P. Massee, W.F.H. Merck
Place of Publication	Eindhoven
Publisher	Eindhoven University of Technology
Pages	1.1-1.16
Publication status	Published - 1985

Access to Document

591699Final published version, 961 KB

Cite this

@inproceedings{cbb7d4c1b397411da3ff4d5f8608845f,

title = "Plasma as a medium for processing",

author = "D.C. Schram",

year = "1985",

language = "English",

pages = "1.1--1.16",

editor = "P. Massee and W.F.H. Merck",

booktitle = "Advanced course on low-pressure plasmas : technology and applications, Eindhoven University of Technology, Eindhoven, June 26-28, 1985 : lecture notes",

publisher = "Eindhoven University of Technology",

}

Plasma as a medium for processing. / Schram, D.C.
Advanced course on low-pressure plasmas : technology and applications, Eindhoven University of Technology, Eindhoven, June 26-28, 1985 : lecture notes . ed. / P. Massee; W.F.H. Merck. Eindhoven: Eindhoven University of Technology, 1985. p. 1.1-1.16.

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic

TY - GEN

T1 - Plasma as a medium for processing

AU - Schram, D.C.

PY - 1985

Y1 - 1985

M3 - Conference contribution

SP - 1.1-1.16

BT - Advanced course on low-pressure plasmas : technology and applications, Eindhoven University of Technology, Eindhoven, June 26-28, 1985 : lecture notes

A2 - Massee, P.

A2 - Merck, W.F.H.

PB - Eindhoven University of Technology

CY - Eindhoven

ER -