Plasma and thermal ALD of Al2O3 in a commercial 200 mm ALD reactor

J.L. Hemmen, van, S.B.S. Heil, J.H. Klootwijk, F. Roozeboom, C.J. Hodson, M.C.M. Sanden, van de, W.M.M. Kessels

Research output: Contribution to journalArticleAcademicpeer-review

206 Citations (Scopus)
977 Downloads (Pure)

Fingerprint

Dive into the research topics of 'Plasma and thermal ALD of Al2O3 in a commercial 200 mm ALD reactor'. Together they form a unique fingerprint.

Engineering & Materials Science

Chemical Compounds