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Plasma and thermal ALD of Al2O3 in a commercial 200 mm ALD reactor
J.L. Hemmen, van, S.B.S. Heil, J.H. Klootwijk, F. Roozeboom, C.J. Hodson, M.C.M. Sanden, van de, W.M.M. Kessels
Research output: Contribution to journal › Article › Academic › peer-review
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