Plasma accumulation effects in Extreme Ultra-Violet generated plasmas

R.M. Horst, van der, S. Nijdam, J. Beckers, G.M.W. Kroesen

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Abstract

In order to meet the demand of increasing computer speed and memory capacity, industries are striving to reduce the size of computer chips. This miniaturization can be achieved by reducing the wavelength in lithography machines to Extreme Ultra-Violet (EUV, 92 eV). The low-pressure (around 1 Pa) transparent background gas (e.g. H2 and He) in the lithography machine is partially ionized by the absorption of EUV photons. The study of these low-density 1E15 m^-3 pulsed plasmas is interesting and experimentally challenging. The electron density is measured with microwave cavity resonance spectroscopy (MCRS). In MCRS measurements the resonance frequency in a cavity is determined, this frequency depends on the electron density in the cavity. In this research the plasma accumulation is studied in an EUV-generated plasma in argon. The EUV source generates EUV pulses with a repetition frequency between 500 Hz and 10 kHz. The accumulation of plasma is clearly observed at frequencies above 1 kHz.
Original languageEnglish
Pages1-1
Publication statusPublished - 2014
Event26th NNV Symposium on Plasma Physics and Radiation Technology, March 11-12, 2014,  Lunteren, The Netherlands - De Werelt, Lunteren, Netherlands
Duration: 11 Mar 201412 Mar 2014
http://www.plasmalunteren.nl/download/2014/26th_symposium_lunteren_2014_book_v05mar2014.pdf

Conference

Conference26th NNV Symposium on Plasma Physics and Radiation Technology, March 11-12, 2014,  Lunteren, The Netherlands
CountryNetherlands
CityLunteren
Period11/03/1412/03/14
Internet address

Bibliographical note

Proceedings of the 26th Annual Meeting on Plasma Physics and Radiation Technology CPS/NNV, 11-12 maart 2014, Lunteren. The Netherlands

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  • Cite this

    Horst, van der, R. M., Nijdam, S., Beckers, J., & Kroesen, G. M. W. (2014). Plasma accumulation effects in Extreme Ultra-Violet generated plasmas. 1-1. Poster session presented at 26th NNV Symposium on Plasma Physics and Radiation Technology, March 11-12, 2014,  Lunteren, The Netherlands, Lunteren, Netherlands.