Plasimo simulations of sputtering hollow cathode discharge: optimization of the cathode geometry

D.B. Mihailova; J. Dijk, van; G.J.M. Hagelaar; M. Grozeva; J.J.A.M. Mullen, van der

Plasimo simulations of sputtering hollow cathode discharge: optimization of the cathode geometry

D.B. Mihailova
, J. Dijk, van
, G.J.M. Hagelaar
, M. Grozeva
, J.J.A.M. Mullen, van der

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic

9 Downloads (Pure)

Abstract

no abstract

Original language	English
Title of host publication	Proceedings of the 12th Euregional Workshop on the Exploration of Low Temperature Plasma Physics (WELTPP-12 2009), 26-27 November 2009, Kerkrade, The Netherlands
Place of Publication	Kerkrade, The Netherlands,
Publication status	Published - 2009
Event	12th Euregional Workshop on the Exploration of Low Temperature Plasma Physics (WELTPP 2009) - Conference centre "Rolduc", Kerkrade, Netherlands Duration: 26 Nov 2009 → 27 Nov 2009

Workshop

Workshop	12th Euregional Workshop on the Exploration of Low Temperature Plasma Physics (WELTPP 2009)
Abbreviated title	WELTPP-12
Country/Territory	Netherlands
City	Kerkrade
Period	26/11/09 → 27/11/09

Cite this

@inproceedings{25604c9c45b342109aa700709b7192e0,

title = "Plasimo simulations of sputtering hollow cathode discharge: optimization of the cathode geometry",

abstract = "no abstract",

author = "D.B. Mihailova and \{Dijk, van\}, J. and G.J.M. Hagelaar and M. Grozeva and \{Mullen, van der\}, J.J.A.M.",

year = "2009",

language = "English",

booktitle = "Proceedings of the 12th Euregional Workshop on the Exploration of Low Temperature Plasma Physics (WELTPP-12 2009), 26-27 November 2009, Kerkrade, The Netherlands",

note = "12th Euregional Workshop on the Exploration of Low Temperature Plasma Physics (WELTPP 2009), WELTPP-12 ; Conference date: 26-11-2009 Through 27-11-2009",

}

Mihailova, DB , Dijk, van, J, Hagelaar, GJM, Grozeva, M & Mullen, van der, JJAM 2009, Plasimo simulations of sputtering hollow cathode discharge: optimization of the cathode geometry. in Proceedings of the 12th Euregional Workshop on the Exploration of Low Temperature Plasma Physics (WELTPP-12 2009), 26-27 November 2009, Kerkrade, The Netherlands. Kerkrade, The Netherlands, 12th Euregional Workshop on the Exploration of Low Temperature Plasma Physics (WELTPP 2009), Kerkrade, Netherlands, 26/11/09.

Plasimo simulations of sputtering hollow cathode discharge: optimization of the cathode geometry. / Mihailova, D.B.; Dijk, van, J.; Hagelaar, G.J.M. et al.
Proceedings of the 12th Euregional Workshop on the Exploration of Low Temperature Plasma Physics (WELTPP-12 2009), 26-27 November 2009, Kerkrade, The Netherlands. Kerkrade, The Netherlands, 2009.

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic

TY - GEN

T1 - Plasimo simulations of sputtering hollow cathode discharge: optimization of the cathode geometry

AU - Mihailova, D.B.

AU - Dijk, van, J.

AU - Hagelaar, G.J.M.

AU - Grozeva, M.

AU - Mullen, van der, J.J.A.M.

PY - 2009

Y1 - 2009

N2 - no abstract

AB - no abstract

M3 - Conference contribution

BT - Proceedings of the 12th Euregional Workshop on the Exploration of Low Temperature Plasma Physics (WELTPP-12 2009), 26-27 November 2009, Kerkrade, The Netherlands

CY - Kerkrade, The Netherlands,

T2 - 12th Euregional Workshop on the Exploration of Low Temperature Plasma Physics (WELTPP 2009)

Y2 - 26 November 2009 through 27 November 2009

ER -

Mihailova DB , Dijk, van J, Hagelaar GJM, Grozeva M, Mullen, van der JJAM. Plasimo simulations of sputtering hollow cathode discharge: optimization of the cathode geometry. In Proceedings of the 12th Euregional Workshop on the Exploration of Low Temperature Plasma Physics (WELTPP-12 2009), 26-27 November 2009, Kerkrade, The Netherlands. Kerkrade, The Netherlands,. 2009

Plasimo simulations of sputtering hollow cathode discharge: optimization of the cathode geometry

Abstract

Workshop

Fingerprint

Cite this