Plasimo simulations of sputtering hollow cathode discharge: optimization of the cathode geometry

D.B. Mihailova, J. Dijk, van, G.J.M. Hagelaar, M. Grozeva, J.J.A.M. Mullen, van der

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademic

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Abstract

no abstract
Original languageEnglish
Title of host publicationProceedings of the 12th Euregional Workshop on the Exploration of Low Temperature Plasma Physics (WELTPP-12 2009), 26-27 November 2009, Kerkrade, The Netherlands
Place of PublicationKerkrade, The Netherlands,
Publication statusPublished - 2009
Event12th Euregional Workshop on the Exploration of Low Temperature Plasma Physics (WELTPP 2009) - Conference centre "Rolduc", Kerkrade, Netherlands
Duration: 26 Nov 200927 Nov 2009

Workshop

Workshop12th Euregional Workshop on the Exploration of Low Temperature Plasma Physics (WELTPP 2009)
Abbreviated titleWELTPP-12
CountryNetherlands
CityKerkrade
Period26/11/0927/11/09

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