Patterned UV photo-polymerization is used to prepare polymer gratings from a mixture of mono- and di-functional acrylate monomers. The difference in reactivity and mobility of these two monomers induces a concentration gradient during the photo-polymerization process. Uniform illumination afterwards fixes the grating. Monomers with different easily detectable elements, e.g., Cl, Br, Si, F, enable the observation of lateral variations of concentration in these gratings with PIXE and PIGE using a scanning ion probe of 3 MeV protons. In addition, backscattering spectrometry is applied to correct for lateral thickness variations.
|Number of pages||5|
|Journal||Nuclear Instruments and Methods in Physics Research. Section B: Beam Interactions with Materials and Atoms|
|Publication status||Published - 2000|