@inproceedings{8f047dfb246848d3b83509a7ae3a28af,
title = "Piezoelectric Wafer Stage Based on Highly Variable Viscoelastic Stiffness",
author = "{de Bruijn}, R.G.C. and Vermeulen, {J.P.M.B. (Hans)} and {van de Wijdeven}, {Jeroen J.M.}",
year = "2023",
month = nov,
day = "15",
language = "English",
isbn = "978-188770659-9",
pages = "1--6",
booktitle = "ASPE 2023 Annual Meeting",
publisher = "American Society of Precision Engineering (ASPE)",
note = "38th Annual Meeting of the American Society of Precision Engineering, ASPE 2023 ; Conference date: 12-11-2023 Through 17-11-2023",
}