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Abstract
Ever-increasing throughput specifications in semiconductor manufacturing require operating high-precision mechatronics, such as linear motors, at higher accelerations. In turn this creates higher nonlinear parasitic forces that cannot be handled by industrial feedforward controllers. Motivated by this problem, in this paper we develop a general framework for inversion-based feedforward controller design using physics-guided neural networks (PGNNs). In contrast with black-box neural networks, the developed PGNNs embed prior physical knowledge in the input and hidden layers, which results in improved training convergence and learning of underlying physical laws. The PGNN inversion-based feedforward control framework is validated in simulation on an industrial linear motor, for which it achieves a mean average tracking error twenty times smaller than mass-acceleration feedforward in simulation
Original language | English |
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Title of host publication | CCTA 2021 - 5th IEEE Conference on Control Technology and Applications |
Publisher | Institute of Electrical and Electronics Engineers |
Pages | 1115-1120 |
Number of pages | 6 |
ISBN (Electronic) | 978-1-6654-3643-4 |
DOIs | |
Publication status | Published - 3 Jan 2022 |
Event | 5th IEEE Conference on Control Technology and Applications, CCTA 2021 - Online, San Diego, United States Duration: 8 Aug 2021 → 11 Aug 2021 Conference number: 5 https://ccta2021.ieeecss.org/ |
Conference
Conference | 5th IEEE Conference on Control Technology and Applications, CCTA 2021 |
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Abbreviated title | CCTA 2021 |
Country/Territory | United States |
City | San Diego |
Period | 8/08/21 → 11/08/21 |
Internet address |
Fingerprint
Dive into the research topics of 'Physics-guided neural networks for inversion-based feedforward control applied to linear motors'. Together they form a unique fingerprint.Projects
- 1 Finished
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PGN Mechatronics: Physics-guided neural controllers for compensating parasitic forces in high-precision mechatronics
Nawijn, H. (Project communication officer), Hendrix, W. H. A. (Project communication officer), Lazar, M. (Project Manager) & Bolderman, M. (Project member)
1/03/20 → 31/12/24
Project: Second tier