Performance predictions of a focused ion beam from a laser cooled and compressed atomic beam

G. Haaf, ten, S.H.W. Wouters, S.B. Geer, van der, E.J.D. Vredenbregt, P.H.A. Mutsaers

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Abstract

Focused ion beams are indispensable tools in the semiconductor industry because of their ability to image and modify structures at the nanometer length scale. Here, we report on performance predictions of a new type of focused ion beam based on photo-ionization of a laser cooled and compressed atomic beam. Particle tracing simulations are performed to investigate the effects of disorder-induced heating after ionization in a large electric field. They lead to a constraint on this electric field strength which is used as input for an analytical model which predicts the minimum attainable spot size as a function of, amongst others, the flux density of the atomic beam, the temperature of this beam, and the total current. At low currents (I¿
Original languageEnglish
Article number244301
Pages (from-to)244301-1/9
Number of pages9
JournalJournal of Applied Physics
Volume116
Issue number24
DOIs
Publication statusPublished - 28 Dec 2014

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