Performance predictions for a laser intensified thermal beam for use in high resolution Focused Ion Beam instruments.

S.H.W. Wouters; G. Haaf, ten; R.P.M.J.W. Notermans; N. Debernardi; P.H.A. Mutsaers; O.J. Luiten; E.J.D. Vredenbregt

Performance predictions for a laser intensified thermal beam for use in high resolution Focused Ion Beam instruments.

S.H.W. Wouters
, G. Haaf, ten
, R.P.M.J.W. Notermans
, N. Debernardi
, P.H.A. Mutsaers
, O.J. Luiten
, E.J.D. Vredenbregt

Coherence and Quantum Technology

Research output: Contribution to journal › Article › Academic

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Original language	English
Pages (from-to)	1-8
Journal	arXiv
Publication status	Published - 2014

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Cite this

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title = "Performance predictions for a laser intensified thermal beam for use in high resolution Focused Ion Beam instruments.",

author = "S.H.W. Wouters and \{Haaf, ten\}, G. and R.P.M.J.W. Notermans and N. Debernardi and P.H.A. Mutsaers and O.J. Luiten and E.J.D. Vredenbregt",

year = "2014",

language = "English",

pages = "1--8",

journal = "arXiv",

issn = "2331-8422",

publisher = "Cornell University",

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TY - JOUR

T1 - Performance predictions for a laser intensified thermal beam for use in high resolution Focused Ion Beam instruments.

AU - Wouters, S.H.W.

AU - Haaf, ten, G.

AU - Notermans, R.P.M.J.W.

AU - Debernardi, N.

AU - Mutsaers, P.H.A.

AU - Luiten, O.J.

AU - Vredenbregt, E.J.D.

PY - 2014

Y1 - 2014

M3 - Article

SN - 2331-8422

SP - 1

EP - 8

JO - arXiv

JF - arXiv

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