Performance prediction and optimization for wafer scanners

J.P.M. Voeten; T. Hendriks; B.D. Theelen; J. Schuddemat; W. Tabingh Suermondt; J. Gemei; C. Kotterink; C. Huët, van

Performance prediction and optimization for wafer scanners

J.P.M. Voeten, T. Hendriks, B.D. Theelen, J. Schuddemat, W. Tabingh Suermondt, J. Gemei, C. Kotterink, C. Huët, van

Electronic Systems

Research output: Contribution to conference › Other › Academic

Original language	English
Publication status	Published - 2011
Event	conference; Dutch Model Checking Day; 2011-06-17; 2011-06-17 - Duration: 17 Jun 2011 → 17 Jun 2011

Conference

Conference	conference; Dutch Model Checking Day; 2011-06-17; 2011-06-17
Period	17/06/11 → 17/06/11
Other	Dutch Model Checking Day

Cite this

@conference{79772f51c00e41b4944695020d8f3c28,

title = "Performance prediction and optimization for wafer scanners",

author = "J.P.M. Voeten and T. Hendriks and B.D. Theelen and J. Schuddemat and {Tabingh Suermondt}, W. and J. Gemei and C. Kotterink and {Hu{\"e}t, van}, C.",

year = "2011",

language = "English",

note = "conference; Dutch Model Checking Day; 2011-06-17; 2011-06-17 ; Conference date: 17-06-2011 Through 17-06-2011",

}

TY - CONF

T1 - Performance prediction and optimization for wafer scanners

AU - Voeten, J.P.M.

AU - Hendriks, T.

AU - Theelen, B.D.

AU - Schuddemat, J.

AU - Tabingh Suermondt, W.

AU - Gemei, J.

AU - Kotterink, C.

AU - Huët, van, C.

PY - 2011

Y1 - 2011

M3 - Other

T2 - conference; Dutch Model Checking Day; 2011-06-17; 2011-06-17

Y2 - 17 June 2011 through 17 June 2011

ER -