Performance of a six Degree-of-Freedom controlled moving-magnet planar actuator with a laser interferometer measurement setup

J. Achterberg, J.M.M. Rovers, C.M.M. Lierop, van, J.W. Jansen, P.P.J. Bosch, van den

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Abstract

This paper concerns measurements with a nineaxes laser interferometer system, to determine the six-Degree-of-Freedom (DoF) performance of an electromagnetically levitated moving-magnet planar actuator with long-stroke capability in the plane. The new measurement system has 0.15 nm resolution over the full xy-stroke of 0.223 m × 0.223 m. The limitations on the attainable closed-loop tracking performance have been determined experimentally. The high performance measurement system has a negligible influence on this tracking performance. Consequently, the measured performance limitations are due to the actuator and the applied control method.
Original languageEnglish
Title of host publicationProceedings of The eighth international symposium on linear drives for industry applications (LDIA), 3-6 July 2011, Eindhoven, The Netherlands
PublisherLDIA
Pages1-6
Publication statusPublished - 2011

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    Achterberg, J., Rovers, J. M. M., Lierop, van, C. M. M., Jansen, J. W., & Bosch, van den, P. P. J. (2011). Performance of a six Degree-of-Freedom controlled moving-magnet planar actuator with a laser interferometer measurement setup. In Proceedings of The eighth international symposium on linear drives for industry applications (LDIA), 3-6 July 2011, Eindhoven, The Netherlands (pp. 1-6). LDIA.