Performance of a six Degree-of-Freedom controlled moving-magnet planar actuator with a laser interferometer measurement setup

J. Achterberg; J.M.M. Rovers; C.M.M. Lierop, van; J.W. Jansen; P.P.J. Bosch, van den

Performance of a six Degree-of-Freedom controlled moving-magnet planar actuator with a laser interferometer measurement setup

J. Achterberg, J.M.M. Rovers, C.M.M. Lierop, van, J.W. Jansen, P.P.J. Bosch, van den

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review

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Abstract

This paper concerns measurements with a nineaxes laser interferometer system, to determine the six-Degree-of-Freedom (DoF) performance of an electromagnetically levitated moving-magnet planar actuator with long-stroke capability in the plane. The new measurement system has 0.15 nm resolution over the full xy-stroke of 0.223 m × 0.223 m. The limitations on the attainable closed-loop tracking performance have been determined experimentally. The high performance measurement system has a negligible influence on this tracking performance. Consequently, the measured performance limitations are due to the actuator and the applied control method.

Original language	English
Title of host publication	Proceedings of The eighth international symposium on linear drives for industry applications (LDIA), 3-6 July 2011, Eindhoven, The Netherlands
Publisher	LDIA
Pages	1-6
Publication status	Published - 2011

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Achterberg, J., Rovers, J. M. M., Lierop, van, C. M. M., Jansen, J. W., & Bosch, van den, P. P. J. (2011). Performance of a six Degree-of-Freedom controlled moving-magnet planar actuator with a laser interferometer measurement setup. In Proceedings of The eighth international symposium on linear drives for industry applications (LDIA), 3-6 July 2011, Eindhoven, The Netherlands (pp. 1-6). LDIA.

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title = "Performance of a six Degree-of-Freedom controlled moving-magnet planar actuator with a laser interferometer measurement setup",

abstract = "This paper concerns measurements with a nineaxes laser interferometer system, to determine the six-Degree-of-Freedom (DoF) performance of an electromagnetically levitated moving-magnet planar actuator with long-stroke capability in the plane. The new measurement system has 0.15 nm resolution over the full xy-stroke of 0.223 m × 0.223 m. The limitations on the attainable closed-loop tracking performance have been determined experimentally. The high performance measurement system has a negligible influence on this tracking performance. Consequently, the measured performance limitations are due to the actuator and the applied control method.",

author = "J. Achterberg and J.M.M. Rovers and {Lierop, van}, C.M.M. and J.W. Jansen and {Bosch, van den}, P.P.J.",

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Achterberg, J, Rovers, JMM, Lierop, van, CMM, Jansen, JW & Bosch, van den, PPJ 2011, Performance of a six Degree-of-Freedom controlled moving-magnet planar actuator with a laser interferometer measurement setup. in Proceedings of The eighth international symposium on linear drives for industry applications (LDIA), 3-6 July 2011, Eindhoven, The Netherlands. LDIA, pp. 1-6.

Performance of a six Degree-of-Freedom controlled moving-magnet planar actuator with a laser interferometer measurement setup. / Achterberg, J.; Rovers, J.M.M.; Lierop, van, C.M.M. et al.

Proceedings of The eighth international symposium on linear drives for industry applications (LDIA), 3-6 July 2011, Eindhoven, The Netherlands. LDIA, 2011. p. 1-6.

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review

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AB - This paper concerns measurements with a nineaxes laser interferometer system, to determine the six-Degree-of-Freedom (DoF) performance of an electromagnetically levitated moving-magnet planar actuator with long-stroke capability in the plane. The new measurement system has 0.15 nm resolution over the full xy-stroke of 0.223 m × 0.223 m. The limitations on the attainable closed-loop tracking performance have been determined experimentally. The high performance measurement system has a negligible influence on this tracking performance. Consequently, the measured performance limitations are due to the actuator and the applied control method.

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Performance of a six Degree-of-Freedom controlled moving-magnet planar actuator with a laser interferometer measurement setup

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