Abstract
The Double Layer Planar Motor (DLPM) is a 6- DOF moving-magnet magnetically levitated planar motor designed as a potential next step in the development of wafer stages in the semiconductor lithographic industry. This paper discusses details of the test setup, and the first measurement results.
| Original language | English |
|---|---|
| Title of host publication | Proceedings of the 10th International Symposium on Linear Drives for Industry Applications (LDIA 2015), 27-29 July 2015, Aachen, Germany |
| Place of Publication | s.l. |
| Publisher | s.n. |
| Publication status | Published - 2015 |
| Event | 10th International Symposium on Linear Drives for Industry Applications (LDIA 2015), July 27-29, 2015, Aachen, Germany - SuperC, Aachen, Germany Duration: 27 Jul 2015 → 29 Jul 2015 http://www.iem.rwth-aachen.de/aw/cms/IEM/Zielgruppen/ldia-2015/ldia/Horizontalmenu/~wky/startseite-ldia/?lang=de |
Conference
| Conference | 10th International Symposium on Linear Drives for Industry Applications (LDIA 2015), July 27-29, 2015, Aachen, Germany |
|---|---|
| Abbreviated title | LDIA 2015 |
| Country/Territory | Germany |
| City | Aachen |
| Period | 27/07/15 → 29/07/15 |
| Internet address |
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