Performance analysis of coherent optical scatterometry

O. El Gawhary, N. Kumar, S.F. Pereira, W.M.J. Coene, H.P. Urbach

Research output: Contribution to journalArticleAcademicpeer-review

36 Citations (Scopus)
235 Downloads (Pure)


Scatterometry is a well established technique currently utilized in research, as well as in industrial applications, to retrieve the properties of a given scatterer (the target) by looking at how the light coming from a certain source is diffracted in the far field. Currently the light source is often a discharge lamp that, after wavelength filtering, can be thought as a quasi-monochromatic, but spatially incoherent, source. In the present work, benefits of using a focused spot from a spatially coherent light source, as that emitted by a laser, are investigated on a theoretical viewpoint. The focused spot is scanned over the object of interest and, for each scan position, a far-field diffraction pattern is recorded. Our results show that spatially coherent light can sensibly increase the accuracy of the technique with respect to the target’s geometrical profile.
Original languageEnglish
Pages (from-to)775-781
Number of pages7
JournalApplied Physics B: Lasers and Optics
Issue number4
Publication statusPublished - 2011


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