PECVD of thin Films: The study of plasma-surface interaction by means of in situ plasma and film diagnostics

Research output: Contribution to conference › Other › Academic

Original language	English
Publication status	Published - 2004
Event	conference; University of Alabama; 2004-05-06; 2004-05-06 - Duration: 6 May 2004 → 6 May 2004

Conference	conference; University of Alabama; 2004-05-06; 2004-05-06
Period	6/05/04 → 6/05/04
Other	University of Alabama

Cite this

@conference{a8f2cf33ea794ee4b4381604b2f861e7,

title = "PECVD of thin Films: The study of plasma-surface interaction by means of in situ plasma and film diagnostics",

author = "\{Sanden, van de\}, M.C.M.",

year = "2004",

language = "English",

note = "conference; University of Alabama; 2004-05-06; 2004-05-06 ; Conference date: 06-05-2004 Through 06-05-2004",

}