PECVD of thin Films: The study of plasma-surface interaction by means of in situ plasma and film diagnostics

Research output: Contribution to conferenceOtherAcademic

Original languageEnglish
Publication statusPublished - 2004
Eventconference; University of Alabama; 2004-05-06; 2004-05-06 -
Duration: 6 May 20046 May 2004

Conference

Conferenceconference; University of Alabama; 2004-05-06; 2004-05-06
Period6/05/046/05/04
OtherUniversity of Alabama

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