PECVD of thin Films: The study of plasma-surface interaction by means of in situ plasma and film diagnostics

Research output: Contribution to conferenceOtherAcademic

Original languageEnglish
Publication statusPublished - 2004
Eventconference; University of Alabama; 2004-05-06; 2004-05-06 -
Duration: 6 May 20046 May 2004

Conference

Conferenceconference; University of Alabama; 2004-05-06; 2004-05-06
Period6/05/046/05/04
OtherUniversity of Alabama

Cite this

@conference{a8f2cf33ea794ee4b4381604b2f861e7,
title = "PECVD of thin Films: The study of plasma-surface interaction by means of in situ plasma and film diagnostics",
author = "{Sanden, van de}, M.C.M.",
year = "2004",
language = "English",
note = "conference; University of Alabama; 2004-05-06; 2004-05-06 ; Conference date: 06-05-2004 Through 06-05-2004",

}

Sanden, van de, MCM 2004, 'PECVD of thin Films: The study of plasma-surface interaction by means of in situ plasma and film diagnostics' conference; University of Alabama; 2004-05-06; 2004-05-06, 6/05/04 - 6/05/04, .

PECVD of thin Films: The study of plasma-surface interaction by means of in situ plasma and film diagnostics. / Sanden, van de, M.C.M.

2004. conference; University of Alabama; 2004-05-06; 2004-05-06, .

Research output: Contribution to conferenceOtherAcademic

TY - CONF

T1 - PECVD of thin Films: The study of plasma-surface interaction by means of in situ plasma and film diagnostics

AU - Sanden, van de, M.C.M.

PY - 2004

Y1 - 2004

M3 - Other

ER -