| Original language | English |
|---|---|
| Publication status | Published - 2004 |
| Event | conference; University of Alabama; 2004-05-06; 2004-05-06 - Duration: 6 May 2004 → 6 May 2004 |
Conference
| Conference | conference; University of Alabama; 2004-05-06; 2004-05-06 |
|---|---|
| Period | 6/05/04 → 6/05/04 |
| Other | University of Alabama |
Cite this
Sanden, van de, M. C. M. (2004). PECVD of thin Films: The study of plasma-surface interaction by means of in situ plasma and film diagnostics. conference; University of Alabama; 2004-05-06; 2004-05-06, .
@conference{a8f2cf33ea794ee4b4381604b2f861e7,
title = "PECVD of thin Films: The study of plasma-surface interaction by means of in situ plasma and film diagnostics",
author = "{Sanden, van de}, M.C.M.",
year = "2004",
language = "English",
note = "conference; University of Alabama; 2004-05-06; 2004-05-06 ; Conference date: 06-05-2004 Through 06-05-2004",
}
Sanden, van de, MCM 2004, 'PECVD of thin Films: The study of plasma-surface interaction by means of in situ plasma and film diagnostics', conference; University of Alabama; 2004-05-06; 2004-05-06, 6/05/04 - 6/05/04.
PECVD of thin Films: The study of plasma-surface interaction by means of in situ plasma and film diagnostics. / Sanden, van de, M.C.M.
2004. conference; University of Alabama; 2004-05-06; 2004-05-06, .Research output: Contribution to conference › Other › Academic
TY - CONF
T1 - PECVD of thin Films: The study of plasma-surface interaction by means of in situ plasma and film diagnostics
AU - Sanden, van de, M.C.M.
PY - 2004
Y1 - 2004
M3 - Other
ER -
Sanden, van de MCM. PECVD of thin Films: The study of plasma-surface interaction by means of in situ plasma and film diagnostics. 2004. conference; University of Alabama; 2004-05-06; 2004-05-06, .