PECVD of thin films: the study of plasma-surface interaction by means of in situ plasma and film diagnostics

Research output: Contribution to conferenceOtherAcademic

Original languageEnglish
Publication statusPublished - 2004
Eventconference; 47th Annual SVC Technical Conference; 2004-04-30; 2004-04-30 -
Duration: 30 Apr 200430 Apr 2004

Conference

Conferenceconference; 47th Annual SVC Technical Conference; 2004-04-30; 2004-04-30
Period30/04/0430/04/04
Other47th Annual SVC Technical Conference

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