PECVD of thin films: the study of plasma-surface interaction by means of in situ plasma and film diagnostics

Research output: Contribution to conference › Other › Academic

Original language	English
Publication status	Published - 2004
Event	conference; 47th Annual SVC Technical Conference; 2004-04-30; 2004-04-30 - Duration: 30 Apr 2004 → 30 Apr 2004

Conference	conference; 47th Annual SVC Technical Conference; 2004-04-30; 2004-04-30
Period	30/04/04 → 30/04/04
Other	47th Annual SVC Technical Conference

Cite this

@conference{b1615c6b211b4bd2a2bf020a67167dba,

title = "PECVD of thin films: the study of plasma-surface interaction by means of in situ plasma and film diagnostics",

author = "{Sanden, van de}, M.C.M.",

year = "2004",

language = "English",

note = "conference; 47th Annual SVC Technical Conference; 2004-04-30; 2004-04-30 ; Conference date: 30-04-2004 Through 30-04-2004",

}