PECVD of thin films: the study of plasma-surface interaction by means of in situ plasma and film diagnostics

Research output: Contribution to conferenceOtherAcademic

Original languageEnglish
Publication statusPublished - 2004
Eventconference; 47th Annual SVC Technical Conference; 2004-04-30; 2004-04-30 -
Duration: 30 Apr 200430 Apr 2004

Conference

Conferenceconference; 47th Annual SVC Technical Conference; 2004-04-30; 2004-04-30
Period30/04/0430/04/04
Other47th Annual SVC Technical Conference

Cite this

@conference{b1615c6b211b4bd2a2bf020a67167dba,
title = "PECVD of thin films: the study of plasma-surface interaction by means of in situ plasma and film diagnostics",
author = "{Sanden, van de}, M.C.M.",
year = "2004",
language = "English",
note = "conference; 47th Annual SVC Technical Conference; 2004-04-30; 2004-04-30 ; Conference date: 30-04-2004 Through 30-04-2004",

}

Sanden, van de, MCM 2004, 'PECVD of thin films: the study of plasma-surface interaction by means of in situ plasma and film diagnostics' conference; 47th Annual SVC Technical Conference; 2004-04-30; 2004-04-30, 30/04/04 - 30/04/04, .

PECVD of thin films: the study of plasma-surface interaction by means of in situ plasma and film diagnostics. / Sanden, van de, M.C.M.

2004. conference; 47th Annual SVC Technical Conference; 2004-04-30; 2004-04-30, .

Research output: Contribution to conferenceOtherAcademic

TY - CONF

T1 - PECVD of thin films: the study of plasma-surface interaction by means of in situ plasma and film diagnostics

AU - Sanden, van de, M.C.M.

PY - 2004

Y1 - 2004

M3 - Other

ER -

Sanden, van de MCM. PECVD of thin films: the study of plasma-surface interaction by means of in situ plasma and film diagnostics. 2004. conference; 47th Annual SVC Technical Conference; 2004-04-30; 2004-04-30, .