| Original language | English |
|---|---|
| Title of host publication | NanoNed MicroNed Symposium II; Eindhoven, Netherlands, the (16 nov - 17 nov 2006) |
| Publication status | Published - 2006 |
Patterning Ultra-High Bit Densities by Large-Area e-Beam Lithography
C.G.C.H.M. Fabrie
Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic