Passivation on mc-si solar cells with PECVD SiNx:H using N2 and SiH4

H.C. Rieffe, W.J. Soppe, J.G. Hong, Richard van de Sanden, A.W. Weeber

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

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Original languageEnglish
Title of host publication18th European Photovoltaic Solar Energy Conference and Exhibition
Number of pages4
Publication statusPublished - Oct 2002
Event18th European Photocoltaic Solar Energy Conference and Exhibition - Rome, Italy
Duration: 7 Oct 200211 Oct 2002

Conference

Conference18th European Photocoltaic Solar Energy Conference and Exhibition
CountryItaly
CityRome
Period7/10/0211/10/02

Cite this

Rieffe, H. C., Soppe, W. J., Hong, J. G., van de Sanden, R., & Weeber, A. W. (2002). Passivation on mc-si solar cells with PECVD SiNx:H using N2 and SiH4. In 18th European Photovoltaic Solar Energy Conference and Exhibition