Passivation on mc-si solar cells with PECVD SiNx:H using N2 and SiH4

Passivation on mc-si solar cells with PECVD SiN_x:H using N₂ and SiH₄

H.C. Rieffe, W.J. Soppe, J.G. Hong, Richard van de Sanden, A.W. Weeber

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review

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Original language	English
Title of host publication	18th European Photovoltaic Solar Energy Conference and Exhibition
Number of pages	4
Publication status	Published - Oct 2002
Event	18th European Photocoltaic Solar Energy Conference and Exhibition - Rome, Italy Duration: 7 Oct 2002 → 11 Oct 2002

Conference	18th European Photocoltaic Solar Energy Conference and Exhibition
Country/Territory	Italy
City	Rome
Period	7/10/02 → 11/10/02

@inproceedings{fe03ffe3a25543df9da35f16d53b2108,

title = "Passivation on mc-si solar cells with PECVD SiNx:H using N2 and SiH4",

author = "H.C. Rieffe and W.J. Soppe and J.G. Hong and {van de Sanden}, Richard and A.W. Weeber",

year = "2002",

month = oct,

language = "English",

booktitle = "18th European Photovoltaic Solar Energy Conference and Exhibition",

note = "18th European Photocoltaic Solar Energy Conference and Exhibition ; Conference date: 07-10-2002 Through 11-10-2002",

}

TY - GEN

T1 - Passivation on mc-si solar cells with PECVD SiNx:H using N2 and SiH4

AU - Rieffe, H.C.

AU - Soppe, W.J.

AU - Hong, J.G.

AU - van de Sanden, Richard

AU - Weeber, A.W.

PY - 2002/10

Y1 - 2002/10

M3 - Conference contribution

BT - 18th European Photovoltaic Solar Energy Conference and Exhibition

T2 - 18th European Photocoltaic Solar Energy Conference and Exhibition

Y2 - 7 October 2002 through 11 October 2002

ER -