Abstract
Dust forming, capacitively-coupled RF plasmas, generated in helium-diluted silane at 13.56 MHz, are investigated using non-intrusive optical diagnostics. Measurements based on laser light scattering and spatio-temporal optical emission spectroscopy are presented. These measurements provide valuable insight into the particle dynamics inside the discharge chamber. Laser light scattering is especially suited to the localization of the particles, hence proving very useful as a process tool. Spatio-temporal optical emission spectroscopy is used to study the silane’s dissociation. There are several experimental indications that particles are spatially segregated at the plasma-sheath boundaries, near the RF-powered electrode where they are thought to be formed and near the grounded electrode where they are transported by the gravity and the ion drag forces.
| Original language | English |
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| Title of host publication | Proceedings of the 27th International Conference on Phenomena in Ionised Gases (XXVII ICPIG 2005) 17-22 July 2005, Eindhoven, the Netherlands |
| Editors | E.M. Veldhuizen, van |
| Place of Publication | Eindhoven |
| Publisher | Eindhoven University of Technology |
| Pages | 12-461-1/4 |
| ISBN (Print) | 90-386-2231-7 |
| Publication status | Published - 2005 |
| Event | 27th International Conference on Phenomena in Ionized Gases (ICPIG 2005) - Eindhoven, Netherlands Duration: 17 Jul 2005 → 22 Jul 2005 |
Conference
| Conference | 27th International Conference on Phenomena in Ionized Gases (ICPIG 2005) |
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| Abbreviated title | ICPIG 2005 |
| Country/Territory | Netherlands |
| City | Eindhoven |
| Period | 17/07/05 → 22/07/05 |