Parameter-oriented reduction strategies for a thermo-mechanical model of extreme ultraviolet reticles

C. Bikcora, S. Weiland

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

4 Citations (Scopus)
1 Downloads (Pure)

Fingerprint

Dive into the research topics of 'Parameter-oriented reduction strategies for a thermo-mechanical model of extreme ultraviolet reticles'. Together they form a unique fingerprint.

Engineering