P-type nc-SiOx:H emitter layer for silicon heterojunction solar cells grown by RF-PECVD

H.A. Gatz, Y. Kuang, M.A. Verheijen, J.K. Rath, W.M.M. Kessels, R.E.I. Schropp

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review


Silicon heterojunction solar cells (SHJ) with thin intrinsic layers are well known for their high efficiencies. A promising way to further enhance their excellent characteristics is to enable more light to enter the crystalline silicon (c-Si) absorber of the cell while maintaining a simple cell configuration. Our approach is to replace the amorphous silicon (a-Si:H) emitter layer with a more transparent nanocrystalline silicon oxide (nc-SiOx:H) layer. In this work, we focus on optimizing the p-type nc-SiOx:H material properties, grown by radio frequency plasma enhanced chemical vapor deposition (rf PECVD), on an amorphous silicon layer. 20 nm thick nanocrystalline layers were successfully grown on a 5 nm a-Si:H layer. The effect of different ratios of trimethylboron to silane gas flow rates on the material properties were investigated, yielding an optimized material with a conductivity in the lateral direction of 7.9×10-4 S/cm combined with a band gap of E04 = 2.33 eV. Despite its larger thickness as compared to a conventional window a-Si:H p-layer, the novel layer stack of a-Si:H(i)/nc-SiOx:H(p) shows significantly enhanced transmission compared to the stack with a conventional a-Si:H(p) emitter. Altogether, the chosen material exhibits promising characteristics for implementation in SHJ solar cells.
Original languageEnglish
Title of host publicationMaterial Research Society (MRS) Proceedings
EditorsB. Hekmatshoar, R. Collins
PublisherMaterials Research Society
Publication statusPublished - 2015
Event2015 Materials Research Society Spring Meeting - San Francisco, California, United States
Duration: 6 Apr 201510 Apr 2015

Publication series

NameMaterials Research Society Symposium Proceedings
ISSN (Print)0272-9172


Conference2015 Materials Research Society Spring Meeting
Country/TerritoryUnited States
CitySan Francisco, California
Other2015 Spring Meeting


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