P-111 : a thin film encapsulation stack for PLED and OLED displays

F.J.H. Assche, van; R.T. Vangheluwe; J.W.C. Maes; W.S. Mischke; M.D. Bijker; F.C. Dings; M.F.J. Evers; W.M.M. Kessels; M.C.M. Sanden, van de

doi:10.1889/1.1831072

P-111 : a thin film encapsulation stack for PLED and OLED displays

F.J.H. Assche, van, R.T. Vangheluwe, J.W.C. Maes, W.S. Mischke, M.D. Bijker, F.C. Dings, M.F.J. Evers, W.M.M. Kessels, M.C.M. Sanden, van de

Research output: Contribution to journal › Article › Academic › peer-review

Abstract

For a thin film (<1 µm) encapsulation stack consisting of only 3 plasma deposited silicon nitride layers separated by a thin (<100 nm) organic layer, a water permeation rate of below 10–5 g/m2 per day at 50 °C and 50% rH has been measured using the Ca test. PLED lifetimes of over 500 hours at 60 °C and 90% rH have been reached locally. While the Ca test indicates that pinhole free encapsulation is possible, edge and particle related defects still forecast a challenge for device encapsulation.

Original language	English
Pages (from-to)	695-697
Journal	Digest of Technical Papers - SID International Symposium
Volume	35
Issue number	1
DOIs	https://doi.org/10.1889/1.1831072
Publication status	Published - 2004

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AU - Assche, van, F.J.H.

AU - Vangheluwe, R.T.

AU - Maes, J.W.C.

AU - Mischke, W.S.

AU - Bijker, M.D.

AU - Dings, F.C.

AU - Evers, M.F.J.

AU - Kessels, W.M.M.

AU - Sanden, van de, M.C.M.

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AB - For a thin film (<1 µm) encapsulation stack consisting of only 3 plasma deposited silicon nitride layers separated by a thin (<100 nm) organic layer, a water permeation rate of below 10–5 g/m2 per day at 50 °C and 50% rH has been measured using the Ca test. PLED lifetimes of over 500 hours at 60 °C and 90% rH have been reached locally. While the Ca test indicates that pinhole free encapsulation is possible, edge and particle related defects still forecast a challenge for device encapsulation.

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DO - 10.1889/1.1831072

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JF - Digest of Technical Papers - SID International Symposium

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P-111 : a thin film encapsulation stack for PLED and OLED displays

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