Oxygen microwave plasma model for glass deposition

M.J. Donker, van den; M. Jimenez-Diaz; J. Dijk, van; N. Vries, de; M.J.N. Stralen, van; J.J.A.M. Mullen, van der

Oxygen microwave plasma model for glass deposition

M.J. Donker, van den, M. Jimenez-Diaz, J. Dijk, van, N. Vries, de, M.J.N. Stralen, van, J.J.A.M. Mullen, van der

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic

Abstract

Abstract A11

Original language	English
Title of host publication	Abstract presented at the 19th Symposium Plasma Physics & Radiation Technology 2007, 6-8 March 2007, Lunteren, The Netherlands
Publication status	Published - 2007

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@inproceedings{df21355f86f643e3a05664114562cb53,

title = "Oxygen microwave plasma model for glass deposition",

abstract = "Abstract A11",

author = "{Donker, van den}, M.J. and M. Jimenez-Diaz and {Dijk, van}, J. and {Vries, de}, N. and {Stralen, van}, M.J.N. and {Mullen, van der}, J.J.A.M.",

year = "2007",

language = "English",

booktitle = "Abstract presented at the 19th Symposium Plasma Physics & Radiation Technology 2007, 6-8 March 2007, Lunteren, The Netherlands",

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TY - GEN

T1 - Oxygen microwave plasma model for glass deposition

AU - Donker, van den, M.J.

AU - Jimenez-Diaz, M.

AU - Dijk, van, J.

AU - Vries, de, N.

AU - Stralen, van, M.J.N.

AU - Mullen, van der, J.J.A.M.

PY - 2007

Y1 - 2007

N2 - Abstract A11

AB - Abstract A11

M3 - Conference contribution

BT - Abstract presented at the 19th Symposium Plasma Physics & Radiation Technology 2007, 6-8 March 2007, Lunteren, The Netherlands

ER -

Oxygen microwave plasma model for glass deposition

Abstract

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