Oxygen microwave plasma model for glass deposition

M.J. Donker, van den, M. Jimenez-Diaz, J. Dijk, van, N. Vries, de, M.J.N. Stralen, van, J.J.A.M. Mullen, van der

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademic

Abstract

Abstract A11
Original languageEnglish
Title of host publicationAbstract presented at the 19th Symposium Plasma Physics & Radiation Technology 2007, 6-8 March 2007, Lunteren, The Netherlands
Publication statusPublished - 2007

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