Orientation identification of the power spectrum

M. Rudnaya, R.M.M. Mattheij, J.M.L. Maubach

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The image Fourier transform is widely used for defocus and astigmatism correction in electron microscopy. The shape of a power spectrum (the square of a modulus of image Fourier transform) is directly related to the three microscope’s controls, namely defocus and two-fold (two-parameter) astigmatism. In this paper the new method for power spectrum orientation identification is proposed. The method is based on the three measures which are related to the microscope’s controls. The measures are derived from the mathematical moments of the power spectrum. The method is tested with the help of a Gaussian benchmark, as well as with the scanning electron microscopy experimental images. The method can be used as an assisting tool for increasing the capabilities of defocus and astigmatism correction a of non-experienced scanning electron microscopy user, as well as a basis for automated application.
Original languageEnglish
Place of PublicationEindhoven
PublisherTechnische Universiteit Eindhoven
Number of pages23
Publication statusPublished - 2010

Publication series

ISSN (Print)0926-4507


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