Abstract
To improve performances of multi-input multioutput (MIMO) scanning stage systems, the possibilities of dynamic decoupling are studied. Atop a course static decoupling, a MIMO finite impulse response (FIR) decoupling structure is added for machine-specific and performance-driven fine tunings. The coefficients of the FIR filters are obtained through data-based optimization while the machine operates in closed loop.
| Original language | English |
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| Title of host publication | ASPE 3rd Meeting on the Control of Precision Systems, April 11 to 13, 2010 |
| Place of Publication | United States, Boston-Cambridge |
| Publisher | American Society of Precision Engineering (ASPE) |
| Pages | 1-6 |
| Publication status | Published - 2010 |