To improve performances of multi-input multioutput (MIMO) scanning stage systems, the possibilities of dynamic decoupling are studied. Atop a course static decoupling, a MIMO finite impulse response (FIR) decoupling structure is added for machine-specific and performance-driven fine tunings. The coefficients of the FIR filters are obtained through data-based optimization while the machine operates in closed loop.
|Title of host publication||ASPE 3rd Meeting on the Control of Precision Systems, April 11 to 13, 2010|
|Place of Publication||United States, Boston-Cambridge|
|Publisher||American Society of Precision Engineering (ASPE)|
|Publication status||Published - 2010|