Optimized dynamic decoupling in scanning stage

M.F. Heertjes, A..J.A. Engelen, van, M. Steinbuch

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To improve performances of multi-input multioutput (MIMO) scanning stage systems, the possibilities of dynamic decoupling are studied. Atop a course static decoupling, a MIMO finite impulse response (FIR) decoupling structure is added for machine-specific and performance-driven fine tunings. The coefficients of the FIR filters are obtained through data-based optimization while the machine operates in closed loop.
Original languageEnglish
Title of host publicationASPE 3rd Meeting on the Control of Precision Systems, April 11 to 13, 2010
Place of PublicationUnited States, Boston-Cambridge
PublisherAmerican Society of Precision Engineering (ASPE)
Publication statusPublished - 2010


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