Optimization of IR heater shapes for mirror temperature control in wafer scanners

Daniël W.M. Veldman, S.A.N. Nouwens, Rob H.B. Fey, Hans J. Zwart, Marc M.J. van de Wal, J.D.B.J. van den Boom, Henk Nijmeijer

Research output: Contribution to conferencePoster

22 Downloads (Pure)
Original languageEnglish
Publication statusPublished - 22 Oct 2019
Event22nd Engineering Mechanics Symposium - Arnhem, Netherlands
Duration: 22 Oct 201923 Oct 2019

Conference

Conference22nd Engineering Mechanics Symposium
CountryNetherlands
CityArnhem
Period22/10/1923/10/19

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