Optimization of hydrogenated amorphous silicon germanium thin films and solar cells deposited by hot wire chemical vapour deposition

L.W. Veldhuizen, C.H.M. Werf, van der, Y. Kuang, N.J. Bakker, S.-J. Yun, R.E.I. Schropp

Research output: Contribution to journalArticleAcademicpeer-review

24 Citations (Scopus)
147 Downloads (Pure)
Original languageEnglish
Pages (from-to)226-230
JournalThin Solid Films
Volume595 B
Publication statusPublished - 30 Nov 2015
Event8th International Conference on Hot-Wire Chemical Vapor Deposition (HWCVD 2014) - Braunschweig, Germany
Duration: 13 Oct 201416 Oct 2014
Conference number: 8


  • Amorphous silicon germanium
  • Hot wire chemical vapor deposition
  • Solar cells
  • Ambipolar diffussion length

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