Optimization of hydrogenated amorphous silicon germanium thin films and solar cells deposited by hot wire chemical vapour deposition

L.W. Veldhuizen; C.H.M. Werf, van der; Y. Kuang; N.J. Bakker; S.-J. Yun; R.E.I. Schropp

doi:10.1016/j.tsf.2015.05.055

Optimization of hydrogenated amorphous silicon germanium thin films and solar cells deposited by hot wire chemical vapour deposition

L.W. Veldhuizen, C.H.M. Werf, van der, Y. Kuang, N.J. Bakker, S.-J. Yun, R.E.I. Schropp

Plasma & Materials Processing

Research output: Contribution to journal › Article › Academic › peer-review

24 Citations (Scopus)

147 Downloads (Pure)

Original language	English
Pages (from-to)	226-230
Journal	Thin Solid Films
Volume	595 B
DOIs	https://doi.org/10.1016/j.tsf.2015.05.055
Publication status	Published - 30 Nov 2015
Event	8th International Conference on Hot-Wire Chemical Vapor Deposition (HWCVD 2014) - Braunschweig, Germany Duration: 13 Oct 2014 → 16 Oct 2014 Conference number: 8 https://hwcvd.fraunhofer.de/en/welcome/

Keywords

Amorphous silicon germanium
Hot wire chemical vapor deposition
Solar cells
Ambipolar diffussion length

Access to Document

10.1016/j.tsf.2015.05.055

publisher versionFinal published version, 604 KB

Cite this

@article{873127eb85044a58a0c1f27549ad7330,

title = "Optimization of hydrogenated amorphous silicon germanium thin films and solar cells deposited by hot wire chemical vapour deposition",

keywords = "Amorphous silicon germanium, Hot wire chemical vapor deposition, Solar cells, Ambipolar diffussion length",

author = "L.W. Veldhuizen and {Werf, van der}, C.H.M. and Y. Kuang and N.J. Bakker and S.-J. Yun and R.E.I. Schropp",

year = "2015",

month = nov,

day = "30",

doi = "10.1016/j.tsf.2015.05.055",

language = "English",

volume = "595 B",

pages = "226--230",

journal = "Thin Solid Films",

issn = "0040-6090",

publisher = "Elsevier",

note = "8th International Conference on Hot-Wire Chemical Vapor Deposition (HWCVD 2014), HWCVD 2014 ; Conference date: 13-10-2014 Through 16-10-2014",

url = "https://hwcvd.fraunhofer.de/en/welcome/",

}

TY - JOUR

T1 - Optimization of hydrogenated amorphous silicon germanium thin films and solar cells deposited by hot wire chemical vapour deposition

AU - Veldhuizen, L.W.

AU - Werf, van der, C.H.M.

AU - Kuang, Y.

AU - Bakker, N.J.

AU - Yun, S.-J.

AU - Schropp, R.E.I.

N1 - Conference code: 8

PY - 2015/11/30

Y1 - 2015/11/30

KW - Amorphous silicon germanium

KW - Hot wire chemical vapor deposition

KW - Solar cells

KW - Ambipolar diffussion length

U2 - 10.1016/j.tsf.2015.05.055

DO - 10.1016/j.tsf.2015.05.055

M3 - Article

VL - 595 B

SP - 226

EP - 230

JO - Thin Solid Films

JF - Thin Solid Films

SN - 0040-6090

T2 - 8th International Conference on Hot-Wire Chemical Vapor Deposition (HWCVD 2014)

Y2 - 13 October 2014 through 16 October 2014

ER -