Optimization of actuator shapes for a wafer heating application

D.W.M. Veldman, R.H.B. Fey, H.J. Zwart, M.M.J. van de Wal, J.D.B.J. van den Boom, H. Nijmeijer

Research output: Contribution to conferencePoster

46 Downloads (Pure)
Original languageEnglish
Number of pages1
Publication statusPublished - 23 Oct 2018
Event21st Engineering Mechanics Symposium - Papendal, Arnhem, Netherlands
Duration: 23 Oct 201824 Oct 2018
Conference number: 21
http://www.em.tue.nl
http://www.em.tue.nl/pdfs/Final%20programme_2018_EM%20Symposium.pdf

Conference

Conference21st Engineering Mechanics Symposium
Abbreviated titleEM 2018
CountryNetherlands
CityArnhem
Period23/10/1824/10/18
Internet address

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