Optimization of actuator shapes for a wafer heating application

D.W.M. Veldman, R.H.B. Fey, H.J. Zwart, M.M.J. van de Wal, J.D.B.J. van den Boom, H. Nijmeijer

Research output: Contribution to conferencePosterAcademic

Conference

Conference21st Engineering Mechanics Symposium
Abbreviated titleEM 2018
CountryNetherlands
CityArnhem
Period23/10/1824/10/18
Internet address

Cite this

Veldman, D. W. M., Fey, R. H. B., Zwart, H. J., van de Wal, M. M. J., van den Boom, J. D. B. J., & Nijmeijer, H. (2018). Optimization of actuator shapes for a wafer heating application. Poster session presented at 21st Engineering Mechanics Symposium, Arnhem, Netherlands.
Veldman, D.W.M. ; Fey, R.H.B. ; Zwart, H.J. ; van de Wal, M.M.J. ; van den Boom, J.D.B.J. ; Nijmeijer, H./ Optimization of actuator shapes for a wafer heating application. Poster session presented at 21st Engineering Mechanics Symposium, Arnhem, Netherlands.1 p.
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title = "Optimization of actuator shapes for a wafer heating application",
author = "D.W.M. Veldman and R.H.B. Fey and H.J. Zwart and {van de Wal}, M.M.J. and {van den Boom}, J.D.B.J. and H. Nijmeijer",
year = "2018",
month = "10",
day = "23",
language = "English",
note = "21st Engineering Mechanics Symposium, EM 2018 ; Conference date: 23-10-2018 Through 24-10-2018",
url = "http://www.em.tue.nl, http://www.em.tue.nl/pdfs/Final{\%}20programme_2018_EM{\%}20Symposium.pdf",

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Veldman, DWM, Fey, RHB, Zwart, HJ, van de Wal, MMJ, van den Boom, JDBJ & Nijmeijer, H 2018, 'Optimization of actuator shapes for a wafer heating application' 21st Engineering Mechanics Symposium, Arnhem, Netherlands, 23/10/18 - 24/10/18, .

Optimization of actuator shapes for a wafer heating application. / Veldman, D.W.M.; Fey, R.H.B.; Zwart, H.J.; van de Wal, M.M.J.; van den Boom, J.D.B.J.; Nijmeijer, H.

2018. Poster session presented at 21st Engineering Mechanics Symposium, Arnhem, Netherlands.

Research output: Contribution to conferencePosterAcademic

TY - CONF

T1 - Optimization of actuator shapes for a wafer heating application

AU - Veldman,D.W.M.

AU - Fey,R.H.B.

AU - Zwart,H.J.

AU - van de Wal,M.M.J.

AU - van den Boom,J.D.B.J.

AU - Nijmeijer,H.

PY - 2018/10/23

Y1 - 2018/10/23

M3 - Poster

ER -

Veldman DWM, Fey RHB, Zwart HJ, van de Wal MMJ, van den Boom JDBJ, Nijmeijer H. Optimization of actuator shapes for a wafer heating application. 2018. Poster session presented at 21st Engineering Mechanics Symposium, Arnhem, Netherlands.