Original language | English |
---|---|
Title of host publication | Proceedings of the 19th Annual Symposium of the IEEE Photonics Benelux Chapter, 3-4 November 2014, Enschede, the Netherlands |
Pages | 1-4 |
Publication status | Published - 2014 |
Optimization of a single-step reactive ion etching process for InP photonic integration
Y. Jiao, T. Vries, de, L. Shen, H.P.M.M. Ambrosius, M.K. Smit, J.J.G.M. Tol, van der
Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review
196
Downloads
(Pure)