Optimising the cascaded arc for a-Si:H deposition at low flows

B.A. Korevaar; M.C.M. Sanden, van de; D.C. Schram

Optimising the cascaded arc for a-Si:H deposition at low flows

B.A. Korevaar, M.C.M. Sanden, van de, D.C. Schram

Plasma & Materials Processing

Research output: Contribution to conference › Poster

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Abstract

Abstract only.

Original language	English
Pages	P12-
Publication status	Published - 1999
Event	2nd Euregional Workshop on the Exploration of Low Temperature Plasma Physics (WELTPP-2), December 2-3, 1999, Kerkrade, The Netherlands - Conference centre "Rolduc", Kerkrade, Netherlands Duration: 2 Dec 1999 → 3 Dec 1999

Workshop

Workshop	2nd Euregional Workshop on the Exploration of Low Temperature Plasma Physics (WELTPP-2), December 2-3, 1999, Kerkrade, The Netherlands
Abbreviated title	WELTPP-2
Country/Territory	Netherlands
City	Kerkrade
Period	2/12/99 → 3/12/99

Bibliographical note

Poster presented at the 2nd Euregional WELT-PP Workshop on the Exploration of Low Temperature Plasma Physics, December 2nd and 3rd, 1999, Rolduc, The Netherlands

Cite this

@conference{82f8777d565f47f6a7599fddb89c08b9,

title = "Optimising the cascaded arc for a-Si:H deposition at low flows",

abstract = "Abstract only.",

author = "B.A. Korevaar and {Sanden, van de}, M.C.M. and D.C. Schram",

note = "Poster presented at the 2nd Euregional WELT-PP Workshop on the Exploration of Low Temperature Plasma Physics, December 2nd and 3rd, 1999, Rolduc, The Netherlands; 2nd Euregional Workshop on the Exploration of Low Temperature Plasma Physics (WELTPP-2), December 2-3, 1999, Kerkrade, The Netherlands, WELTPP-2 ; Conference date: 02-12-1999 Through 03-12-1999",

year = "1999",

language = "English",

pages = "P12--",

}

Optimising the cascaded arc for a-Si:H deposition at low flows. / Korevaar, B.A.; Sanden, van de, M.C.M.; Schram, D.C.
1999. P12- Poster session presented at 2nd Euregional Workshop on the Exploration of Low Temperature Plasma Physics (WELTPP-2), December 2-3, 1999, Kerkrade, The Netherlands, Kerkrade, Netherlands.

Research output: Contribution to conference › Poster

TY - CONF

T1 - Optimising the cascaded arc for a-Si:H deposition at low flows

AU - Korevaar, B.A.

AU - Sanden, van de, M.C.M.

AU - Schram, D.C.

N1 - Poster presented at the 2nd Euregional WELT-PP Workshop on the Exploration of Low Temperature Plasma Physics, December 2nd and 3rd, 1999, Rolduc, The Netherlands

PY - 1999

Y1 - 1999

N2 - Abstract only.

AB - Abstract only.

M3 - Poster

SP - P12-

T2 - 2nd Euregional Workshop on the Exploration of Low Temperature Plasma Physics (WELTPP-2), December 2-3, 1999, Kerkrade, The Netherlands

Y2 - 2 December 1999 through 3 December 1999

ER -

Optimising the cascaded arc for a-Si:H deposition at low flows

Abstract

Workshop

Bibliographical note

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Cite this