Optimal experiment design for multi-variable motion systems: With application to a next-generation wafer stage

Nic Dirkx; Jeroen van de Wijdeven; Tom Oomen

doi:10.1016/j.ifacol.2019.11.744

Optimal experiment design for multi-variable motion systems: With application to a next-generation wafer stage

Nic Dirkx
, Jeroen van de Wijdeven
, Tom Oomen

Control Systems Technology

Research output: Contribution to journal › Conference article › peer-review

2 Citations (Scopus)

Abstract

Frequency Response Functions (FRFs) are essential for motion control design of complex mechatronic systems. The aim of this paper is to develop Optimal Experiment Design (OED) approaches for accurate identification of FRF models, with the particular focus on Multiple Input Multiple Output (MIMO) systems in closed-loop. The resulting optimization problem is shown to be highly challenging, especially for complex systems. A practical and feasible numerical approach based on a convex relaxation is developed. Experimental results on a next-generation wafer stage confirm that the quality of FRF measurements can be improved significantly using the proposed techniques.

Original language	English
Pages (from-to)	615-620
Number of pages	6
Journal	IFAC-PapersOnLine
Volume	52
Issue number	15
DOIs	https://doi.org/10.1016/j.ifacol.2019.11.744
Publication status	Published - Sept 2019
Event	8th IFAC Symposium on Mechatronic Systems, MECHATRONICS 2019 - Vienna, Austria Duration: 4 Sept 2019 → 6 Sept 2019

Funding

This work is part of the research programme VIDI with project vector. φ represents tΦe compleΨ conjugate of φ ∈ C. i★suaThismtiobnerfwo1ro5r6Sk9c8iise,nwpartthifiicchRofises(theepaarrcrthelys()eNafWirnchaOn)programmec.edbytheNVetherlandsIDIwithproOrgan-ject (sTeΦecmetoi)-⊗r.deφop∆niteerreaptrneoerssesdnetonsfotaΦeesmtcaΦotriΨempKlerooΨrnce(soceknmejuri)-gpaprtooedsioutficvtφitayn∈dofC⊙a. number 15698, which is (partly) financed by the Netherlands Organ- vector. φ represents tΦe compleΨ conjugate of φ ∈ C. isation for Scientific Research (NWO). TΦe ⊗ operator denotes tΦe Kronecker product and ⊙ isuamtiobnerfo1r56S9c8ie,nwthifiicchRises(epaarrcthly()NfWinaOn)c.ed by the Netherlands Organ- TeΦceto⊗r. φoperreaptroersednetnsotΦees tcΦoempKleroΨnceocknejurgpartoedoufctφan∈d C⊙. isation for Scientific Research (NWO). TΦe ⊗ operator denotes tΦe Kronecker product and ⊙ isation2405-8963 for©Sc2019, IFAC (International Federation of Automatic Control) Hosting by Elsevier Ltd. All rights reserved.ientific Research (NWO). TΦe ⊗ operator denotes tΦe Kronecker product and ⊙ Copyright © 2019 IFAC 1511 CPoepeyr rriegvhiet w© u2n0d1e9r IrFeAspConsibility of International Federation of Autom1at5i1c1 Control. Copyright © 2019 IFAC 1511 10.1016/j.ifacol.2019.11.744 Copyright © 2019 IFAC 1511

Keywords

Frequency response function
Multisines
Multivariable systems
Optimal experiment design
System identification

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10.1016/j.ifacol.2019.11.744

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title = "Optimal experiment design for multi-variable motion systems: With application to a next-generation wafer stage",

abstract = "Frequency Response Functions (FRFs) are essential for motion control design of complex mechatronic systems. The aim of this paper is to develop Optimal Experiment Design (OED) approaches for accurate identification of FRF models, with the particular focus on Multiple Input Multiple Output (MIMO) systems in closed-loop. The resulting optimization problem is shown to be highly challenging, especially for complex systems. A practical and feasible numerical approach based on a convex relaxation is developed. Experimental results on a next-generation wafer stage confirm that the quality of FRF measurements can be improved significantly using the proposed techniques.",

keywords = "Frequency response function, Multisines, Multivariable systems, Optimal experiment design, System identification",

author = "Nic Dirkx and \{van de Wijdeven\}, Jeroen and Tom Oomen",

year = "2019",

month = sep,

doi = "10.1016/j.ifacol.2019.11.744",

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journal = "IFAC-PapersOnLine",

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AU - van de Wijdeven, Jeroen

AU - Oomen, Tom

PY - 2019/9

Y1 - 2019/9

N2 - Frequency Response Functions (FRFs) are essential for motion control design of complex mechatronic systems. The aim of this paper is to develop Optimal Experiment Design (OED) approaches for accurate identification of FRF models, with the particular focus on Multiple Input Multiple Output (MIMO) systems in closed-loop. The resulting optimization problem is shown to be highly challenging, especially for complex systems. A practical and feasible numerical approach based on a convex relaxation is developed. Experimental results on a next-generation wafer stage confirm that the quality of FRF measurements can be improved significantly using the proposed techniques.

AB - Frequency Response Functions (FRFs) are essential for motion control design of complex mechatronic systems. The aim of this paper is to develop Optimal Experiment Design (OED) approaches for accurate identification of FRF models, with the particular focus on Multiple Input Multiple Output (MIMO) systems in closed-loop. The resulting optimization problem is shown to be highly challenging, especially for complex systems. A practical and feasible numerical approach based on a convex relaxation is developed. Experimental results on a next-generation wafer stage confirm that the quality of FRF measurements can be improved significantly using the proposed techniques.

KW - Frequency response function

KW - Multisines

KW - Multivariable systems

KW - Optimal experiment design

KW - System identification

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M3 - Conference article

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IS - 15

Y2 - 4 September 2019 through 6 September 2019

ER -

Optimal experiment design for multi-variable motion systems: With application to a next-generation wafer stage

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