Optimal experiment design for multi-variable motion systems: With application to a next-generation wafer stage

Nic Dirkx, Jeroen van de Wijdeven, Tom Oomen

Research output: Contribution to journalConference articleAcademicpeer-review

Abstract

Frequency Response Functions (FRFs) are essential for motion control design of complex mechatronic systems. The aim of this paper is to develop Optimal Experiment Design (OED) approaches for accurate identification of FRF models, with the particular focus on Multiple Input Multiple Output (MIMO) systems in closed-loop. The resulting optimization problem is shown to be highly challenging, especially for complex systems. A practical and feasible numerical approach based on a convex relaxation is developed. Experimental results on a next-generation wafer stage confirm that the quality of FRF measurements can be improved significantly using the proposed techniques.

Original languageEnglish
Pages (from-to)615-620
Number of pages6
JournalIFAC-PapersOnLine
Volume52
Issue number15
DOIs
Publication statusPublished - Sep 2019
Event8th IFAC Symposium on Mechatronic Systems, MECHATRONICS 2019 - Vienna, Austria
Duration: 4 Sep 20196 Sep 2019

Keywords

  • Frequency response function
  • Multisines
  • Multivariable systems
  • Optimal experiment design
  • System identification

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