Optimal Experiment Design for a Wafer Stage: A Sequential Relaxation Approach

Nic Dirkx, Jeroen van de Wijdeven, Tom Oomen

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic

121 Downloads (Pure)

Original language	English
Title of host publication	39th Benelux Meeting on Systems and Control
Subtitle of host publication	Book of Abstracts
Editors	Raffaela Carloni, Bayu Jayawardhana, Erjen Lefeber
Place of Publication	Groningen
Publisher	University of Groningen
Pages	98
Number of pages	1
ISBN (Electronic)	978-94-034-2570-2
ISBN (Print)	978-94-034-2571-9
Publication status	Published - 2020
Event	39th Benelux Meeting on Systems and Control 2020 - Elspeet, Netherlands Duration: 10 Mar 2020 → 12 Mar 2020 Conference number: 39 http://www.beneluxmeeting.nl/2020/

Conference	39th Benelux Meeting on Systems and Control 2020
Country/Territory	Netherlands
City	Elspeet
Period	10/03/20 → 12/03/20
Internet address	http://www.beneluxmeeting.nl/2020/

Access to Document

@inproceedings{a3a8f448be4c4c2495e1c688338918a6,

title = "Optimal Experiment Design for a Wafer Stage: A Sequential Relaxation Approach",

author = "Nic Dirkx and {van de Wijdeven}, Jeroen and Tom Oomen",

year = "2020",

language = "English",

isbn = "978-94-034-2571-9",

pages = "98",

editor = "Raffaela Carloni and Bayu Jayawardhana and Erjen Lefeber",

booktitle = "39th Benelux Meeting on Systems and Control",

publisher = "University of Groningen",

note = "39th Benelux Meeting on Systems and Control 2020 ; Conference date: 10-03-2020 Through 12-03-2020",

url = "http://www.beneluxmeeting.nl/2020/",

}

Optimal Experiment Design for a Wafer Stage: A Sequential Relaxation Approach. / Dirkx, Nic; van de Wijdeven, Jeroen; Oomen, Tom.
39th Benelux Meeting on Systems and Control: Book of Abstracts. ed. / Raffaela Carloni; Bayu Jayawardhana; Erjen Lefeber. Groningen: University of Groningen, 2020. p. 98.

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic

TY - GEN

T1 - Optimal Experiment Design for a Wafer Stage

T2 - 39th Benelux Meeting on Systems and Control 2020

AU - Dirkx, Nic

AU - van de Wijdeven, Jeroen

AU - Oomen, Tom

N1 - Conference code: 39

PY - 2020

Y1 - 2020

M3 - Conference contribution

SN - 978-94-034-2571-9

SP - 98

BT - 39th Benelux Meeting on Systems and Control

A2 - Carloni, Raffaela

A2 - Jayawardhana, Bayu

A2 - Lefeber, Erjen

PB - University of Groningen

CY - Groningen

Y2 - 10 March 2020 through 12 March 2020

ER -