@inproceedings{fba7d6a26d34402e94c1378f967b3f0d,
title = "Optical second harmonic generation as a diagnostic tool in Ar+ and XeF2 beam studies of silicon",
author = "J.J.H. Gielis and A.A.E. Stevens and P.M. Gevers and H.C.W. Beijerinck and {Sanden, van de}, M.C.M.",
year = "2005",
language = "English",
booktitle = "Proceedings of the 52th AVS International Symposium, 30 October - 4 November 2005, Hynes Convention Center, Boston, USA",
note = "52th International Symposium of the American Vacuum Society, AVS 52 ; Conference date: 30-10-2005 Through 04-11-2005",
}