Optical interconnect on CMOS ICs made with compact silicon nitride building blocs and photodector

R. Orobtchouk, B. Han, P.R.A. Binetti, S. Jeannot, X.J.M. Leijtens, T. Benyattou, J.-M. Fédéli

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review

Original language	English
Title of host publication	Proceedings of EMRS Spring Conference 2009, 8-12 June 2009, Strassbourg, France
Publication status	Published - 2009

Cite this

@inproceedings{a65d7b3165e641d2901990bfa6dcaf6b,

title = "Optical interconnect on CMOS ICs made with compact silicon nitride building blocs and photodector",

author = "R. Orobtchouk and B. Han and P.R.A. Binetti and S. Jeannot and X.J.M. Leijtens and T. Benyattou and J.-M. F{\'e}d{\'e}li",

year = "2009",

language = "English",

booktitle = "Proceedings of EMRS Spring Conference 2009, 8-12 June 2009, Strassbourg, France",

}

TY - GEN

T1 - Optical interconnect on CMOS ICs made with compact silicon nitride building blocs and photodector

AU - Orobtchouk, R.

AU - Han, B.

AU - Binetti, P.R.A.

AU - Jeannot, S.

AU - Leijtens, X.J.M.

AU - Benyattou, T.

AU - Fédéli, J.-M.

PY - 2009

Y1 - 2009

M3 - Conference contribution

BT - Proceedings of EMRS Spring Conference 2009, 8-12 June 2009, Strassbourg, France

ER -