Optical interconnect on CMOS ICs made with compact silicon nitride building blocs and photodector

R. Orobtchouk, B. Han, P.R.A. Binetti, S. Jeannot, X.J.M. Leijtens, T. Benyattou, J.-M. Fédéli

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

Original languageEnglish
Title of host publicationProceedings of EMRS Spring Conference 2009, 8-12 June 2009, Strassbourg, France
Publication statusPublished - 2009

Cite this

Orobtchouk, R., Han, B., Binetti, P. R. A., Jeannot, S., Leijtens, X. J. M., Benyattou, T., & Fédéli, J-M. (2009). Optical interconnect on CMOS ICs made with compact silicon nitride building blocs and photodector. In Proceedings of EMRS Spring Conference 2009, 8-12 June 2009, Strassbourg, France