TY - JOUR
T1 - Optical and mechanical properties of plasma-beam-deposited amorphous hydrogenated carbon
AU - Gielen, J.W.A.M.
AU - Kleuskens, P.R.M.
AU - Sanden, van de, M.C.M.
AU - IJzendoorn, van, L.J.
AU - Schram, D.C.
AU - Dekempeneer, E.H.A.
AU - Meneve, J.
PY - 1996
Y1 - 1996
N2 - Amorphous hydrogenated carbon films have been deposited on crystalline silicon and on glass from an expanding thermal plasma. Two deposition parameters have been varied: the electric current through the plasma source and the admixed acetylene flow. No energetic ion bombardment has been applied during deposition. Ex situ analysis of the films yields the infrared refractive index, hardness, Young’s modulus, optical band gap, bonded hydrogen content, and the total hydrogen and mass density. The infrared refractive index describes the film properties independent of which plasma deposition parameter (arc current or acetylene flow) has been varied. The hardness, Young’s modulus, sp2/sp3 ratio, and mass density increase with increasing refractive index. The optical band gap and hydrogen content of the films decrease with increasing refractive index. It is demonstrated that plasma-beam-deposited diamondlike a-C:H has similar properties as material deposited with conventional plasma-enhanced chemical-vapor-depositions techniques under energetic ion bombardment.
AB - Amorphous hydrogenated carbon films have been deposited on crystalline silicon and on glass from an expanding thermal plasma. Two deposition parameters have been varied: the electric current through the plasma source and the admixed acetylene flow. No energetic ion bombardment has been applied during deposition. Ex situ analysis of the films yields the infrared refractive index, hardness, Young’s modulus, optical band gap, bonded hydrogen content, and the total hydrogen and mass density. The infrared refractive index describes the film properties independent of which plasma deposition parameter (arc current or acetylene flow) has been varied. The hardness, Young’s modulus, sp2/sp3 ratio, and mass density increase with increasing refractive index. The optical band gap and hydrogen content of the films decrease with increasing refractive index. It is demonstrated that plasma-beam-deposited diamondlike a-C:H has similar properties as material deposited with conventional plasma-enhanced chemical-vapor-depositions techniques under energetic ion bombardment.
U2 - 10.1063/1.363567
DO - 10.1063/1.363567
M3 - Article
SN - 0021-8979
VL - 80
SP - 5986
EP - 5995
JO - Journal of Applied Physics
JF - Journal of Applied Physics
IS - 10
ER -