Opportunities for (plasma-assisted) ALD for semiconductors and non-semiconductors

Research output: Contribution to conferenceOther

Original languageEnglish
Publication statusPublished - 2010
Eventconference; Applied Materials; 2010-07-01; 2010-07-01 -
Duration: 1 Jul 20101 Jul 2010

Conference

Conferenceconference; Applied Materials; 2010-07-01; 2010-07-01
Period1/07/101/07/10
OtherApplied Materials

Cite this

Kessels, W. M. M. (2010). Opportunities for (plasma-assisted) ALD for semiconductors and non-semiconductors. conference; Applied Materials; 2010-07-01; 2010-07-01, .