Opportunities for (plasma-assisted) ALD for semiconductors and non-semiconductors

Research output: Contribution to conferenceOtherAcademic

Conference

Conferenceconference; Applied Materials; 2010-07-01; 2010-07-01
Period1/07/101/07/10
OtherApplied Materials

Cite this

Kessels, W. M. M. (2010). Opportunities for (plasma-assisted) ALD for semiconductors and non-semiconductors. conference; Applied Materials; 2010-07-01; 2010-07-01, .
@conference{a67a1952f67c404ea970428c03b41b2f,
title = "Opportunities for (plasma-assisted) ALD for semiconductors and non-semiconductors",
author = "W.M.M. Kessels",
year = "2010",
language = "English",
note = "conference; Applied Materials; 2010-07-01; 2010-07-01 ; Conference date: 01-07-2010 Through 01-07-2010",

}

Kessels, WMM 2010, 'Opportunities for (plasma-assisted) ALD for semiconductors and non-semiconductors' conference; Applied Materials; 2010-07-01; 2010-07-01, 1/07/10 - 1/07/10, .

Opportunities for (plasma-assisted) ALD for semiconductors and non-semiconductors. / Kessels, W.M.M.

2010. conference; Applied Materials; 2010-07-01; 2010-07-01, .

Research output: Contribution to conferenceOtherAcademic

TY - CONF

T1 - Opportunities for (plasma-assisted) ALD for semiconductors and non-semiconductors

AU - Kessels,W.M.M.

PY - 2010

Y1 - 2010

M3 - Other

ER -

Kessels WMM. Opportunities for (plasma-assisted) ALD for semiconductors and non-semiconductors. 2010. conference; Applied Materials; 2010-07-01; 2010-07-01, .