Ontwerpen van reactoren voor thermische Chemical Vapor Deposition (CVD)

N.M.A. de Wild, Technische Universiteit Eindhoven (TUE). Stan Ackermans Instituut. Proces-technologie

Research output: ThesisPd Eng Thesis

Original languageDutch
QualificationDoctor of Philosophy
Awarding Institution
Supervisors/Advisors
  • Marin, G.B.M.M., Supervisor
  • Metselaar, Ruud, Supervisor
  • de Croon, Mart, Supervisor
Award date1 Jan 1993
Place of PublicationEindhoven
Publisher
Print ISBNs90-5282-282-4
Publication statusPublished - 1993

Bibliographical note

Eindverslag

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