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One and two dimensional dust void formation in an RF plasma

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Abstract

Void formation in one- and two-dimensional complex (dusty) radio-frequency plasmas has been studied using spherical and cylindrically shaped particles. Threshold values for void formation have been determined for plasma power, pressure and number of particles. A comparison between an electropositive argon and an electronegative oxygen plasma shows that void formation in electronegative plasmas is hindered, due to a better radial confinement of the particle cloud. No significant dependence on the particle shape (spherical versus cylindrical) has been observed. Comparing one- and two- dimensional structures shows that collective particle behaviour is not responsible for the void formation, but possibly does contribute to the cloud confinement.
Original languageEnglish
Title of host publicationProceedings of the 27th International Conference on Phenomena in Ionised Gases (XXVII ICPIG 2005) 17-22 July 2005, Eindhoven, the Netherlands
EditorsE.M. Veldhuizen, van
Place of PublicationEindhoven
PublisherEindhoven University of Technology
Pages12-448-1/5
ISBN (Print)90-386-2231-7
Publication statusPublished - 2005
Event27th International Conference on Phenomena in Ionized Gases (ICPIG 2005) - Eindhoven, Netherlands
Duration: 17 Jul 200522 Jul 2005

Conference

Conference27th International Conference on Phenomena in Ionized Gases (ICPIG 2005)
Abbreviated titleICPIG 2005
Country/TerritoryNetherlands
CityEindhoven
Period17/07/0522/07/05

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