On-wafer time-dependent high reproducibility nano-force tensile testing.

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Original language	English
Pages (from-to)	495306/1-1/17
Number of pages	18
Journal	Journal of Physics D: Applied Physics
Volume	47
Issue number	49
DOIs	https://doi.org/10.1088/0022-3727/47/49/495306
Publication status	Published - 2014

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@article{e696355e97c849aabd5404ef7427746c,

title = "On-wafer time-dependent high reproducibility nano-force tensile testing.",

author = "L.I.J.C. Bergers and J.P.M. Hoefnagels and M.G.D. Geers",

year = "2014",

doi = "10.1088/0022-3727/47/49/495306",

language = "English",

volume = "47",

pages = "495306/1--1/17",

journal = "Journal of Physics D: Applied Physics",

issn = "0022-3727",

publisher = "Institute of Physics",

number = "49",

}

TY - JOUR

T1 - On-wafer time-dependent high reproducibility nano-force tensile testing.

AU - Bergers, L.I.J.C.

AU - Hoefnagels, J.P.M.

AU - Geers, M.G.D.

PY - 2014

Y1 - 2014

U2 - 10.1088/0022-3727/47/49/495306

DO - 10.1088/0022-3727/47/49/495306

M3 - Article

SN - 0022-3727

VL - 47

SP - 495306/1-1/17

JO - Journal of Physics D: Applied Physics

JF - Journal of Physics D: Applied Physics

IS - 49

ER -