On-wafer time-dependent high reproducibility nano-force tensile testing.

L.I.J.C. Bergers, J.P.M. Hoefnagels, M.G.D. Geers

Research output: Contribution to journalArticleAcademicpeer-review

14 Citations (Scopus)
154 Downloads (Pure)
Original languageEnglish
Pages (from-to)495306/1-1/17
Number of pages18
JournalJournal of Physics D: Applied Physics
Volume47
Issue number49
DOIs
Publication statusPublished - 2014

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