On the use of shape memory alloy thin films to tune the dynamic response of micro-cantilevers

T. Kniknie; Y.J. Bellouard; F.G.A. Homburg; H. Nijmeijer; X. Wang; J.J. Vlassak

doi:10.1088/0960-1317/20/1/015039

On the use of shape memory alloy thin films to tune the dynamic response of micro-cantilevers

T. Kniknie, Y.J. Bellouard, F.G.A. Homburg, H. Nijmeijer, X. Wang, J.J. Vlassak

Research output: Contribution to journal › Article › Academic › peer-review

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Abstract

We investigate the effect of martensitic phase transformations on the dynamic response of commercial AFM silicon cantilevers coated with shape memory alloy (SMA) thin films. We propose a simple thermo-mechanical model to predict the phase transformation. We show experimentally that the SMA thin film dynamic response can be actively changed upon heating and cooling. This can be used for vibration control in micro-systems.

Original language	English
Pages (from-to)	015039-1/8
Journal	Journal of Micromechanics and Microengineering
Volume	20
Issue number	1
DOIs	https://doi.org/10.1088/0960-1317/20/1/015039
Publication status	Published - 2010

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title = "On the use of shape memory alloy thin films to tune the dynamic response of micro-cantilevers",

abstract = "We investigate the effect of martensitic phase transformations on the dynamic response of commercial AFM silicon cantilevers coated with shape memory alloy (SMA) thin films. We propose a simple thermo-mechanical model to predict the phase transformation. We show experimentally that the SMA thin film dynamic response can be actively changed upon heating and cooling. This can be used for vibration control in micro-systems.",

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AU - Kniknie, T.

AU - Bellouard, Y.J.

AU - Homburg, F.G.A.

AU - Nijmeijer, H.

AU - Wang, X.

AU - Vlassak, J.J.

PY - 2010

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N2 - We investigate the effect of martensitic phase transformations on the dynamic response of commercial AFM silicon cantilevers coated with shape memory alloy (SMA) thin films. We propose a simple thermo-mechanical model to predict the phase transformation. We show experimentally that the SMA thin film dynamic response can be actively changed upon heating and cooling. This can be used for vibration control in micro-systems.

AB - We investigate the effect of martensitic phase transformations on the dynamic response of commercial AFM silicon cantilevers coated with shape memory alloy (SMA) thin films. We propose a simple thermo-mechanical model to predict the phase transformation. We show experimentally that the SMA thin film dynamic response can be actively changed upon heating and cooling. This can be used for vibration control in micro-systems.

U2 - 10.1088/0960-1317/20/1/015039

DO - 10.1088/0960-1317/20/1/015039

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JO - Journal of Micromechanics and Microengineering

JF - Journal of Micromechanics and Microengineering

IS - 1

ER -

On the use of shape memory alloy thin films to tune the dynamic response of micro-cantilevers

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