On the use of shape memory alloy thin films to tune the dynamic response of micro-cantilevers

T. Kniknie, Y.J. Bellouard, F.G.A. Homburg, H. Nijmeijer, X. Wang, J.J. Vlassak

Research output: Contribution to journalArticleAcademicpeer-review

10 Citations (Scopus)
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Abstract

We investigate the effect of martensitic phase transformations on the dynamic response of commercial AFM silicon cantilevers coated with shape memory alloy (SMA) thin films. We propose a simple thermo-mechanical model to predict the phase transformation. We show experimentally that the SMA thin film dynamic response can be actively changed upon heating and cooling. This can be used for vibration control in micro-systems.
Original languageEnglish
Pages (from-to)015039-1/8
JournalJournal of Micromechanics and Microengineering
Volume20
Issue number1
DOIs
Publication statusPublished - 2010

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