We present some small optical instruments fabricated with femtosecond laser pulses. These instruments, made from monolithic fused silica substrates, incorporate an extensive collection of optical and micro-mechanical elements. A single manufacturing step was used to define both the optical and the mechanical features. This approach dramatically simplifies overall fabrication and eliminates alignment issues associated with sequential fabrication processes. Potential applications and technical challenges are reviewed.
|Title of host publication||Laser applications in microelectronic and optoelectronic manufacturing VII : 26 - 29 January 2009, San Jose, California, United States|
|Place of Publication||Bellingham, Wash.|
|Publication status||Published - 2009|
|Name||Proceedings of SPIE|