On the use of femtosecond lasers to fabricate small optical instrumentsmade from fused silica monoliths

P. Bado, A.A. Said, M. Dugan, T. Haddock, Y.J. Bellouard

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

Abstract

We present some small optical instruments fabricated with femtosecond laser pulses. These instruments, made from monolithic fused silica substrates, incorporate an extensive collection of optical and micro-mechanical elements. A single manufacturing step was used to define both the optical and the mechanical features. This approach dramatically simplifies overall fabrication and eliminates alignment issues associated with sequential fabrication processes. Potential applications and technical challenges are reviewed.
Original languageEnglish
Title of host publicationLaser applications in microelectronic and optoelectronic manufacturing VII : 26 - 29 January 2009, San Jose, California, United States
EditorsM. Meunier
Place of PublicationBellingham, Wash.
PublisherSPIE
Pages72010P-
ISBN (Print)978-0-8194-7447-6
DOIs
Publication statusPublished - 2009

Publication series

NameProceedings of SPIE
Volume7201
ISSN (Print)0277-786X

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