On the use of femtosecond lasers to fabricate small optical instrumentsmade from fused silica monoliths

P. Bado; A.A. Said; M. Dugan; T. Haddock; Y.J. Bellouard

doi:10.1117/12.813749

On the use of femtosecond lasers to fabricate small optical instrumentsmade from fused silica monoliths

P. Bado, A.A. Said, M. Dugan, T. Haddock, Y.J. Bellouard

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review

Abstract

We present some small optical instruments fabricated with femtosecond laser pulses. These instruments, made from monolithic fused silica substrates, incorporate an extensive collection of optical and micro-mechanical elements. A single manufacturing step was used to define both the optical and the mechanical features. This approach dramatically simplifies overall fabrication and eliminates alignment issues associated with sequential fabrication processes. Potential applications and technical challenges are reviewed.

Original language	English
Title of host publication	Laser applications in microelectronic and optoelectronic manufacturing VII : 26 - 29 January 2009, San Jose, California, United States
Editors	M. Meunier
Place of Publication	Bellingham, Wash.
Publisher	SPIE
Pages	72010P-
ISBN (Print)	978-0-8194-7447-6
DOIs	https://doi.org/10.1117/12.813749
Publication status	Published - 2009

Publication series

Name	Proceedings of SPIE
Volume	7201
ISSN (Print)	0277-786X

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10.1117/12.813749

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Bado, P., Said, A. A., Dugan, M., Haddock, T., & Bellouard, Y. J. (2009). On the use of femtosecond lasers to fabricate small optical instrumentsmade from fused silica monoliths. In M. Meunier (Ed.), Laser applications in microelectronic and optoelectronic manufacturing VII : 26 - 29 January 2009, San Jose, California, United States (pp. 72010P-). (Proceedings of SPIE; Vol. 7201). SPIE. https://doi.org/10.1117/12.813749

Bado, P. ; Said, A.A. ; Dugan, M. et al. / On the use of femtosecond lasers to fabricate small optical instrumentsmade from fused silica monoliths. Laser applications in microelectronic and optoelectronic manufacturing VII : 26 - 29 January 2009, San Jose, California, United States. editor / M. Meunier. Bellingham, Wash. : SPIE, 2009. pp. 72010P- (Proceedings of SPIE).

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abstract = "We present some small optical instruments fabricated with femtosecond laser pulses. These instruments, made from monolithic fused silica substrates, incorporate an extensive collection of optical and micro-mechanical elements. A single manufacturing step was used to define both the optical and the mechanical features. This approach dramatically simplifies overall fabrication and eliminates alignment issues associated with sequential fabrication processes. Potential applications and technical challenges are reviewed.",

author = "P. Bado and A.A. Said and M. Dugan and T. Haddock and Y.J. Bellouard",

year = "2009",

doi = "10.1117/12.813749",

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Bado, P, Said, AA, Dugan, M, Haddock, T & Bellouard, YJ 2009, On the use of femtosecond lasers to fabricate small optical instrumentsmade from fused silica monoliths. in M Meunier (ed.), Laser applications in microelectronic and optoelectronic manufacturing VII : 26 - 29 January 2009, San Jose, California, United States. Proceedings of SPIE, vol. 7201, SPIE, Bellingham, Wash., pp. 72010P-. https://doi.org/10.1117/12.813749

On the use of femtosecond lasers to fabricate small optical instrumentsmade from fused silica monoliths. / Bado, P.; Said, A.A.; Dugan, M. et al.
Laser applications in microelectronic and optoelectronic manufacturing VII : 26 - 29 January 2009, San Jose, California, United States. ed. / M. Meunier. Bellingham, Wash.: SPIE, 2009. p. 72010P- (Proceedings of SPIE; Vol. 7201).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review

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AB - We present some small optical instruments fabricated with femtosecond laser pulses. These instruments, made from monolithic fused silica substrates, incorporate an extensive collection of optical and micro-mechanical elements. A single manufacturing step was used to define both the optical and the mechanical features. This approach dramatically simplifies overall fabrication and eliminates alignment issues associated with sequential fabrication processes. Potential applications and technical challenges are reviewed.

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Bado P, Said AA, Dugan M, Haddock T, Bellouard YJ. On the use of femtosecond lasers to fabricate small optical instrumentsmade from fused silica monoliths. In Meunier M, editor, Laser applications in microelectronic and optoelectronic manufacturing VII : 26 - 29 January 2009, San Jose, California, United States. Bellingham, Wash.: SPIE. 2009. p. 72010P-. (Proceedings of SPIE). doi: 10.1117/12.813749

On the use of femtosecond lasers to fabricate small optical instrumentsmade from fused silica monoliths

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