On the hydrogenation of Poly-Si passivating contacts by Al2O3 and SiNx thin films

Bas W.H. van de Loo, Bart Macco (Corresponding author), Manuel Schnabel, Maciej K. Stodolny, Agnes A. Mewe, David L. Young, William Nemeth, Paul Stradins, Wilhelmus M.M. Kessels

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Engineering & Materials Science

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