On the formation mechanisms of the diffuse atmospheric pressure dielectric barrier discharge in CVD processes of thin silica-like films

S.A. Starostin, P.A. Premkumar, M. Creatore, E.M. Veldhuizen, van, Hinrik Vries, de, R.M.J. Paffen, M.C.M. Sanden, van de

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Physics & Astronomy