TY - JOUR
T1 - On the determination of dopant-concentration profiles by grazing emission X-ray fluorescence spectroscopy using the maximum-entropy method
AU - Smolders, S.M.P.
AU - Urbach, H.P.
PY - 2002
Y1 - 2002
N2 - The determination of concentration profiles of impurities in silicon from angle scans of emitted x-ray fluorescence intensities using the maximum-entropy method is studied. Existence and convergence properties of the maxium- entropy method are discussed. The application of the maximum-entropy method to Grazing emission X-Ray Fluorescence Spectromety is compared with an analytical method. It is found that, provided noise levels are sufficiently low, concentration profiles can be reconstructed without using a priori knowledge.
AB - The determination of concentration profiles of impurities in silicon from angle scans of emitted x-ray fluorescence intensities using the maximum-entropy method is studied. Existence and convergence properties of the maxium- entropy method are discussed. The application of the maximum-entropy method to Grazing emission X-Ray Fluorescence Spectromety is compared with an analytical method. It is found that, provided noise levels are sufficiently low, concentration profiles can be reconstructed without using a priori knowledge.
U2 - 10.1023/A:1020324522086
DO - 10.1023/A:1020324522086
M3 - Article
VL - 43
SP - 115
EP - 134
JO - Journal of Engineering Mathematics
JF - Journal of Engineering Mathematics
SN - 0022-0833
IS - 2-4
ER -