On the determination of dopant-concentration profiles by grazing emission X-ray fluorescence spectroscopy using the maximum-entropy method

S.M.P. Smolders, H.P. Urbach

    Research output: Contribution to journalArticleAcademicpeer-review

    4 Citations (Scopus)

    Abstract

    The determination of concentration profiles of impurities in silicon from angle scans of emitted x-ray fluorescence intensities using the maximum-entropy method is studied. Existence and convergence properties of the maxium- entropy method are discussed. The application of the maximum-entropy method to Grazing emission X-Ray Fluorescence Spectromety is compared with an analytical method. It is found that, provided noise levels are sufficiently low, concentration profiles can be reconstructed without using a priori knowledge.
    Original languageEnglish
    Pages (from-to)115-134
    JournalJournal of Engineering Mathematics
    Volume43
    Issue number2-4
    DOIs
    Publication statusPublished - 2002

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