On hydrogen penetration into ruthenium: The role of tin in blistering of EUV mirrors

Chidozie Onwudinanti

Research output: ThesisPhd Thesis 1 (Research TU/e / Graduation TU/e)

180 Downloads (Pure)
Original languageEnglish
QualificationDoctor of Philosophy
Awarding Institution
  • Applied Physics
  • Koelman, J.M.V.A. (Vianney), Promotor
  • Brocks, Geert H.L.A., Promotor
  • Tao, Shuxia, Copromotor
Award date8 Sep 2021
Place of PublicationEindhoven
Print ISBNs978-94-6419-297-1
Publication statusPublished - 8 Sep 2021

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