We fabricated deep trenches to modify the heat transfer path coming from active components. Current injected in active components and trenches geometry are the parameters considered. We demonstrate how the trenches reduce the thermal crosstalk.
|Title of host publication
|Conference Paper Integrated Photonics Research, Silicon and Nanophotonics, San Diego, California United States, July 13-17, 2014
|Optical Society of America (OSA)
|Published - 2014