On-chip photocurrent displacement sensor based on a waveguide-coupled nanomechanical photonic crystal cavity

Federico Galeotti, Ivana Seršić Vollenbroek, Maurangelo Petruzzella, Francesco M. Pagliano, Frank W.M. van Otten, Žarko Zobenica, Hamed Sadeghian Marnani, Abbas Mohtashami, Rob W. van der Heijden, Andrea Fiore

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Abstract

A nano-opto-electro-mechanical transducer for displacement sensing is presented. It consists of a double-membrane photonic crystal cavity integrated with electro-optical read-out and on-chip light-delivery. The operation is demonstrated by atomic force microscope actuation and photocurrent sensing.

Original languageEnglish
Title of host publication2019 Conference on Lasers and Electro-Optics Europe and European Quantum Electronics Conference, CLEO/Europe-EQEC 2019
Place of PublicationPiscataway
PublisherInstitute of Electrical and Electronics Engineers
Number of pages1
ISBN (Electronic)9781728104690
DOIs
Publication statusPublished - 17 Oct 2019
Event2019 Conference on Lasers and Electro-Optics Europe and European Quantum Electronics Conference, CLEO/Europe-EQEC 2019 - Munich, Germany
Duration: 23 Jun 201927 Jun 2019

Conference

Conference2019 Conference on Lasers and Electro-Optics Europe and European Quantum Electronics Conference, CLEO/Europe-EQEC 2019
CountryGermany
CityMunich
Period23/06/1927/06/19

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    Galeotti, F., Vollenbroek, I. S., Petruzzella, M., Pagliano, F. M., van Otten, F. W. M., Zobenica, Ž., Marnani, H. S., Mohtashami, A., van der Heijden, R. W., & Fiore, A. (2019). On-chip photocurrent displacement sensor based on a waveguide-coupled nanomechanical photonic crystal cavity. In 2019 Conference on Lasers and Electro-Optics Europe and European Quantum Electronics Conference, CLEO/Europe-EQEC 2019 [8871530] Institute of Electrical and Electronics Engineers. https://doi.org/10.1109/CLEOE-EQEC.2019.8871530