Abstract
A nano-opto-electro-mechanical transducer for displacement sensing is presented. It consists of a double-membrane photonic crystal cavity integrated with electro-optical read-out and on-chip light-delivery. The operation is demonstrated by atomic force microscope actuation and photocurrent sensing.
| Original language | English |
|---|---|
| Title of host publication | 2019 Conference on Lasers and Electro-Optics Europe and European Quantum Electronics Conference, CLEO/Europe-EQEC 2019 |
| Place of Publication | Piscataway |
| Publisher | Institute of Electrical and Electronics Engineers |
| Number of pages | 1 |
| ISBN (Electronic) | 9781728104690 |
| DOIs | |
| Publication status | Published - 17 Oct 2019 |
| Event | 2019 Conference on Lasers and Electro-Optics Europe and European Quantum Electronics Conference, CLEO/Europe-EQEC 2019 - Munich, Germany Duration: 23 Jun 2019 → 27 Jun 2019 |
Conference
| Conference | 2019 Conference on Lasers and Electro-Optics Europe and European Quantum Electronics Conference, CLEO/Europe-EQEC 2019 |
|---|---|
| Country | Germany |
| City | Munich |
| Period | 23/06/19 → 27/06/19 |
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On-chip photocurrent displacement sensor based on a waveguide-coupled nanomechanical photonic crystal cavity. / Galeotti, Federico; Vollenbroek, Ivana Seršić; Petruzzella, Maurangelo; Pagliano, Francesco M.; Van Otten, Frank W.M.; Zobenica, Žarko; Marnani, Hamed Sadeghian; Mohtashami, Abbas; van der Heijden, Rob W.; Fiore, Andrea.
2019 Conference on Lasers and Electro-Optics Europe and European Quantum Electronics Conference, CLEO/Europe-EQEC 2019. Piscataway : Institute of Electrical and Electronics Engineers, 2019. 8871530.Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review
TY - GEN
T1 - On-chip photocurrent displacement sensor based on a waveguide-coupled nanomechanical photonic crystal cavity
AU - Galeotti, Federico
AU - Vollenbroek, Ivana Seršić
AU - Petruzzella, Maurangelo
AU - Pagliano, Francesco M.
AU - Van Otten, Frank W.M.
AU - Zobenica, Žarko
AU - Marnani, Hamed Sadeghian
AU - Mohtashami, Abbas
AU - van der Heijden, Rob W.
AU - Fiore, Andrea
PY - 2019/10/17
Y1 - 2019/10/17
N2 - A nano-opto-electro-mechanical transducer for displacement sensing is presented. It consists of a double-membrane photonic crystal cavity integrated with electro-optical read-out and on-chip light-delivery. The operation is demonstrated by atomic force microscope actuation and photocurrent sensing.
AB - A nano-opto-electro-mechanical transducer for displacement sensing is presented. It consists of a double-membrane photonic crystal cavity integrated with electro-optical read-out and on-chip light-delivery. The operation is demonstrated by atomic force microscope actuation and photocurrent sensing.
UR - http://www.scopus.com/inward/record.url?scp=85074626813&partnerID=8YFLogxK
U2 - 10.1109/CLEOE-EQEC.2019.8871530
DO - 10.1109/CLEOE-EQEC.2019.8871530
M3 - Conference contribution
AN - SCOPUS:85074626813
BT - 2019 Conference on Lasers and Electro-Optics Europe and European Quantum Electronics Conference, CLEO/Europe-EQEC 2019
PB - Institute of Electrical and Electronics Engineers
CY - Piscataway
ER -