Abstract
A nano-opto-electro-mechanical transducer for displacement sensing is presented. It consists of a double-membrane photonic crystal cavity integrated with electro-optical read-out and on-chip light-delivery. The operation is demonstrated by atomic force microscope actuation and photocurrent sensing.
Original language | English |
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Title of host publication | 2019 Conference on Lasers and Electro-Optics Europe and European Quantum Electronics Conference, CLEO/Europe-EQEC 2019 |
Place of Publication | Piscataway |
Publisher | Institute of Electrical and Electronics Engineers |
Number of pages | 1 |
ISBN (Electronic) | 9781728104690 |
DOIs | |
Publication status | Published - 17 Oct 2019 |
Event | 2019 Conference on Lasers and Electro-Optics Europe and European Quantum Electronics Conference, CLEO/Europe-EQEC 2019 - Munich, Germany Duration: 23 Jun 2019 → 27 Jun 2019 |
Conference
Conference | 2019 Conference on Lasers and Electro-Optics Europe and European Quantum Electronics Conference, CLEO/Europe-EQEC 2019 |
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Country/Territory | Germany |
City | Munich |
Period | 23/06/19 → 27/06/19 |